"A high sensitivity micromachined accelerometer with an enhanced inertial ..."

Jianbing Xie, Meng Song, Weizheng Yuan (2013)

> Home

Details and statistics

DOI: 10.1109/NEMS.2013.6559745

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/nems/XieSY13
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/nems/XieSY13
Jianbing Xie, Meng Song, Weizheng Yuan:
A high sensitivity micromachined accelerometer with an enhanced inertial mass SOI MEMS process. NEMS 2013: 336-339

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.