"Packaging effect on the flow separation of CMOS thermoresistive micro ..."

Wei Xu et al. (2016)

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DOI: 10.1109/NEMS.2016.7758201

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-05

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Wei Xu, Bo Gao, Yi-Kuen Lee, Yi Chiu:
Packaging effect on the flow separation of CMOS thermoresistive micro calorimetric flow sensors. NEMS 2016: 62-65

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