"Thermal Studies of BEOL-compatible Top-Gated Atomically Thin ALD In2O3 FETs."

Pai-Ying Liao et al. (2022)

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DOI: 10.1109/VLSITECHNOLOGYANDCIR46769.2022.9830279

access: closed

type: Conference or Workshop Paper

metadata version: 2022-08-04

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Pai-Ying Liao, Sami Alajlouni, Mengwei Si, Zhuocheng Zhang, Zehao Lin, Jinhyun Noh, Calista Wilk, Ali Shakouri, Peide D. Ye:
Thermal Studies of BEOL-compatible Top-Gated Atomically Thin ALD In2O3 FETs. VLSI Technology and Circuits 2022: 322-323

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