"FleXstage: Lightweight Magnetically Levitated Precision Stage with ..."

Jingjie Wu, Lei Zhou (2023)

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DOI: 10.48550/ARXIV.2309.11735

access: open

type: Informal or Other Publication

metadata version: 2023-09-25

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  - journals/corr/abs-2309-11735
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  - https://dblp.org/rec/journals/corr/abs-2309-11735
Jingjie Wu, Lei Zhou:
FleXstage: Lightweight Magnetically Levitated Precision Stage with Over-Actuation towards High-Throughput IC Manufacturing. CoRR abs/2309.11735 (2023)

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