"High-Throughput Electron Beam Direct Writing of VIA Layers by Character ..."

Rimon Ikeno et al. (2013)

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DOI: 10.1587/TRANSFUN.E96.A.2458

access: closed

type: Journal Article

metadata version: 2020-04-11

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Rimon Ikeno, Takashi Maruyama, Satoshi Komatsu, Tetsuya Iizuka, Makoto Ikeda, Kunihiro Asada:
High-Throughput Electron Beam Direct Writing of VIA Layers by Character Projection with One-Dimensional VIA Characters. IEICE Trans. Fundam. Electron. Commun. Comput. Sci. 96-A(12): 2458-2466 (2013)

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