"Capacity modelling of a wet bench cluster tool with material handling robot."

Kamil Erkan Kabak, Cathal Heavey, Vincent Corbett (2012)

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DOI: 10.1080/0951192X.2012.667156

access: closed

type: Journal Article

metadata version: 2020-05-11

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Kamil Erkan Kabak, Cathal Heavey, Vincent Corbett:
Capacity modelling of a wet bench cluster tool with material handling robot. Int. J. Comput. Integr. Manuf. 25(11): 1029-1046 (2012)

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