"DeepNAP: Deep neural anomaly pre-detection in a semiconductor fab."

Chunggyeom Kim et al. (2018)

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DOI: 10.1016/J.INS.2018.05.020

access: closed

type: Journal Article

metadata version: 2024-10-06

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Chunggyeom Kim, Jinhyuk Lee, Raehyun Kim, Youngbin Park, Jaewoo Kang:
DeepNAP: Deep neural anomaly pre-detection in a semiconductor fab. Inf. Sci. 457-458: 1-11 (2018)

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