"Fabrication and application of silicon-reinforced PDMS masters."

Cheng Luo, Fang Meng, Anand Francis (2006)

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DOI: 10.1016/J.MEJO.2006.04.010

access: closed

type: Journal Article

metadata version: 2020-02-22

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Cheng Luo, Fang Meng, Anand Francis:
Fabrication and application of silicon-reinforced PDMS masters. Microelectron. J. 37(10): 1036-1046 (2006)

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