"A cost-effective flexible MEMS technique for temperature sensing."

Suyan Xiao et al. (2007)

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DOI: 10.1016/J.MEJO.2007.01.022

access: closed

type: Journal Article

metadata version: 2020-02-22

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Suyan Xiao, Lufeng Che, Xinxin Li, Yuelin Wang:
A cost-effective flexible MEMS technique for temperature sensing. Microelectron. J. 38(3): 360-364 (2007)

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