"Hardening silicon-on-insulator nMOSFETs by multiple-step Si+ ..."

Huixiang Huang et al. (2016)

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DOI: 10.1016/J.MICROREL.2015.12.015

access: closed

type: Journal Article

metadata version: 2020-02-22

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Huixiang Huang, Yanyan Huang, Jiachun Zheng, Sufen Wei, Kai Tang, Dawei Bi, Zhengxuan Zhang:
Hardening silicon-on-insulator nMOSFETs by multiple-step Si⁺ implantation. Microelectron. Reliab. 57: 1-9 (2016)

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