"Effect of physical defect on shmoos in CMOS DSM technologies."

Aziz Machouat et al. (2008)

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DOI: 10.1016/J.MICROREL.2008.07.043

access: closed

type: Journal Article

metadata version: 2020-02-22

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Aziz Machouat, Gérald Haller, Vincent Goubier, Dean Lewis, Philippe Perdu, Vincent Pouget, Pascal Fouillat, Fabien Essely:
Effect of physical defect on shmoos in CMOS DSM technologies. Microelectron. Reliab. 48(8-9): 1333-1338 (2008)

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