"ESD Susceptibility of Submicron Air Gaps."

Heinrich Wolf et al. (2006)

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DOI: 10.1016/J.MICROREL.2006.07.039

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type: Journal Article

metadata version: 2020-02-22

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Heinrich Wolf, Horst A. Gieser, Detlef Bonfert, Markus Hauser:
ESD Susceptibility of Submicron Air Gaps. Microelectron. Reliab. 46(9-11): 1587-1590 (2006)

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