"Field Dynamic Balancing for Magnetically Suspended Turbomolecular Pump."

Qi Chen, Jinlei Li (2023)

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DOI: 10.3390/S23136168

access: open

type: Journal Article

metadata version: 2023-08-18

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Qi Chen, Jinlei Li:
Field Dynamic Balancing for Magnetically Suspended Turbomolecular Pump. Sensors 23(13): 6168 (2023)

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