"Thermal Actuation Based 3-DoF Non-Resonant Microgyroscope Using MetalMUMPs."

Rana Iqtidar Shakoor et al. (2009)

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DOI: 10.3390/S90402389

access: open

type: Journal Article

metadata version: 2018-11-30

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  - https://dblp.org/rec/journals/sensors/ShakoorBKLH09
Rana Iqtidar Shakoor, Shafaat Ahmed Bazaz, Michael Kraft, Yongjun Lai, Muhammad Masood Ul Hassan:
Thermal Actuation Based 3-DoF Non-Resonant Microgyroscope Using MetalMUMPs. Sensors 9(4): 2389-2414 (2009)

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