"L2O-ILT: Learning to Optimize Inverse Lithography Techniques."

Binwu Zhu et al. (2024)

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DOI: 10.1109/TCAD.2023.3323164

access: closed

type: Journal Article

metadata version: 2024-03-16

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Binwu Zhu, Su Zheng, Ziyang Yu, Guojin Chen, Yuzhe Ma, Fan Yang, Bei Yu, Martin D. F. Wong:
L2O-ILT: Learning to Optimize Inverse Lithography Techniques. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 43(3): 944-955 (2024)

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