"Shape Fitting for the Shape Control System of Silicon Single Crystal Growth."

Junli Liang et al. (2015)

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DOI: 10.1109/TII.2015.2390481

access: closed

type: Journal Article

metadata version: 2022-12-07

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Junli Liang, Miaohua Zhang, Ding Liu, Wenyi Wang:
Shape Fitting for the Shape Control System of Silicon Single Crystal Growth. IEEE Trans. Ind. Informatics 11(2): 363-374 (2015)

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