"Miniaturization of on-chip passive electronic devices by silicon nitride ..."

Wen Huang (2017)

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type: Book or Thesis

metadata version: 2023-09-07

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Wen Huang:
Miniaturization of on-chip passive electronic devices by silicon nitride self-rolled-up membrane microtube nanotechnology. University of Illinois Urbana-Champaign, USA, 2017

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