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"Linear stiffness tuning of MEMS triangular capacitors."

Yiming Jin et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451413

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-28

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  dblp key:
  - conf/nems/JinMGZZJ21
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  - https://dblp.org/rec/conf/nems/JinMGZZJ21
Yiming Jin, Zhipeng Ma, Yixuan Guo, Tengfei Zhang, Xudong Zheng, Zhonghe Jin:
Linear stiffness tuning of MEMS triangular capacitors. NEMS 2021: 691-694

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