Article

Integrated maintenance scheduling for semiconductor manufacturing

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CPAIOR'10: Proceedings of the 7th international conference on Integration of AI and OR Techniques in Constraint Programming for Combinatorial Optimization Problems

Pages 92 - 96

https://doi.org/10.1007/978-3-642-13520-0_12

Published: 14 June 2010 Publication History

Abstract

Tools in a manufacturing plant require regular maintenance over their lifespan (e.g. cleaning, calibration, safety checks) in order to keep them running smoothly. In capital intensive industries, such as semi-conductor manufacturing, the scheduling of maintenance operations on the tools used in production is a critical function. Maintenance operations can be expensive to perform, so we should only perform them when necessary. However if maintenance is delayed too long, tools may run sub-optimally or break down (thus requiring even more expensive unplanned, corrective maintenance). Furthermore a tool that is undergoing maintenance may be partly or wholly unavailable for (revenue generating) production operations.

We have developed a system to generate maintenance schedules for the IBM East Fishkill, New York 300mm semiconductor manufacturing plant. In the sections which follow, we give a description of the maintenance scheduling problem in semi-conductor manufacturing and discuss some of the challenges in solving it. We present a goal programming approach that incorporates both constraint programming and mixed-integer programming solution technologies. A system we have developed based on this approach is now in use within IBM.

References

[1]

Bagchi, S., Chen-Ritzo, C., Shikalgar, S., Toner, M.: A full-factory simulator as a daily decision-support tool for 300mm wafer fabrication productivity. In: Mason, S., Hill, R., Moench, L., Rose, O. (eds.) Proceedings of the 2008 Winter Simulation Conference (2008).

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[2]

Baptiste, P., Pape, C.L., Nuijten, W.: Constraint-Based Scheduling - Applying Constraint Programming to Scheduling Problems. International Series in Operations Research and Management Science. Springer, Heidelberg (2001).

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Moritz ADauzère-Pérès SBen-Ammar OVialletelle P(2020)Maintenance with production planning constraints in semiconductor manufacturingProceedings of the Winter Simulation Conference10.5555/3466184.3466401(1921-1930)Online publication date: 14-Dec-2020
https://dl.acm.org/doi/10.5555/3466184.3466401
Morrison JKim HKalir ABuckley SMiller J(2014)Mean cycle time optimization in semiconductor tool sets via PM planning with different cyclesProceedings of the 2014 Winter Simulation Conference10.5555/2693848.2694158(2466-2477)Online publication date: 7-Dec-2014
https://dl.acm.org/doi/10.5555/2693848.2694158

Integrated maintenance scheduling for semiconductor manufacturing

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Published In

CPAIOR'10: Proceedings of the 7th international conference on Integration of AI and OR Techniques in Constraint Programming for Combinatorial Optimization Problems

June 2010

368 pages

ISBN:3642135196

Editors:
Andrea Lodi
DEIS, University of Bologna, Viale Risorgimento 2, Bologna, Italy
,
Michela Milano
DEIS, University of Bologna, Viale Risorgimento 2, Bologna, Italy
,
Paolo Toth
DEIS, University of Bologna, Viale Risorgimento 2, Bologna, Italy

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Springer-Verlag

Berlin, Heidelberg

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Published: 14 June 2010

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Moritz ADauzère-Pérès SBen-Ammar OVialletelle P(2020)Maintenance with production planning constraints in semiconductor manufacturingProceedings of the Winter Simulation Conference10.5555/3466184.3466401(1921-1930)Online publication date: 14-Dec-2020
https://dl.acm.org/doi/10.5555/3466184.3466401
Morrison JKim HKalir ABuckley SMiller J(2014)Mean cycle time optimization in semiconductor tool sets via PM planning with different cyclesProceedings of the 2014 Winter Simulation Conference10.5555/2693848.2694158(2466-2477)Online publication date: 7-Dec-2014
https://dl.acm.org/doi/10.5555/2693848.2694158

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