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Random variability modeling and its impact on scaled CMOS circuits

Published: 01 December 2010 Publication History

Abstract

Random variations have been regarded as one of the major barriers on CMOS scaling. Compact models that physically capture these effects are crucial to bridge the process technology with design optimization. In this paper, 3-D atomistic simulations are performed to investigate fundamental variations in a scaled CMOS device, including random dopant fluctuation (RDF), line-edge roughness (LER), and oxide thickness fluctuation (OTF). By understanding the underlying physics and analyzing simulation results, compact models for random threshold (V th ) variations are developed. The models are scalable with device specifications, enabling quantitative analysis of circuit performance variability in future technology nodes. Using representative circuits, such as the inverter chain and SRAM cell, key insights are extracted on the trend of variability, as well as the implications on robust design.

References

[1]
International Technology Roadmap for Semiconductors (2008) (available at http://public.itrs.net).
[2]
Bernstein, K., et al.: High-performance CMOS variability in the 65-nm regime and beyond. IBM J. Res. Dev. 50(4/5), 433-449 (2006).
[3]
Putra, A.T., Nishida, A., Kamohara, S., Hiramoto, T.: Random Vth variation induced by gate edge fluctuations in nanoscale MOSFETs. In: Silicon Nanoelectronics Workshop, pp. 73-74 (2007).
[4]
Asenov, A., Kaya, S., Brown, A.: Intrinsic parameterfluctuations in decananometer mosfets introduced by gate line edgeroughness. IEEE Trans. Electron Devices 50(5), 1254-1260 (2003).
[5]
Goodnick, S.M., Ferry, D.K., Wilmsen, C.W.: Surface roughness at the Si(100)-SiO2 interface. Phys. Rev. B 32(12), 8171-8182 (1985).
[6]
Ezaki, T., Ikezawa, T., Notsu, A., Tanaka, K., Hane, M.: 3D MOSFET simulation considering long-range coulomb potential effects for analyzing statistical dopant-induced fluctuations associated with atomistic process simulator. In: Proc. SISPAD, pp. 91-94 (2002).
[7]
Sentaurus User's Manual, Synopsys, Inc., Mountain View, CA, v. 2009.6.
[8]
Xiong, S., Bokor, J.: Study of gate line edge roughness Effect in 50 nm bulk MOSFET devices. Proc. SPIE 4689, 733 (2002).
[9]
Zhao, W., Cao, Y.: New generation of predictive technology model for sub-45 nm design exploration. IEEE TED 53(11), 2816-2823 (2006).
[10]
Sano, N., Matsuzawa, K., Mukai, M., Nakayama, N.: On discrete random dopant modeling in drift-diffusion simulations: Physical meaning of 'atomistic' dopants. Microelectron. Reliab. 42(2), 189-199 (2002).
[11]
Sardo, S., et al.: Line edge roughness (LER) reduction strategy for SOI waveguides fabrication. Microelectron. Eng. 85(5-6), 1210- 1213 (2008).
[12]
Takeuchi, K., et al.: Understanding random threshold voltage fluctuation by comparing multiple fabs and technologies. IEEE Trans. Electron. Devices 467-470 (2007).
[13]
Alexander, C., Roy, G., Asenov, A.: Random-dopant-induced drain current variation in nano-MOSFETs: A three-dimensional self-consistent Monte Carlo simulation study using "ab initio" ionized impurity scattering. IEEE Trans. Electron Devices 55(11), 3251-3258 (2008).
[14]
Liu, Z.H., et al.: Threshold voltage model for deep-submicrometer MOSFETs. IEEE Trans. Electron Devices 40(1), 86-95 (1993).
[15]
Xi, X., Dunga, M., He, J., Liu, W., Cao, K.M., Jin, X., Ou, J.J., Chan, M., Niknejad, A.M., Hu, C.: BSIM4 Manual. UC Berkeley Device Group.

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  1. Random variability modeling and its impact on scaled CMOS circuits

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    Published In

    cover image Journal of Computational Electronics
    Journal of Computational Electronics  Volume 9, Issue 3-4
    December 2010
    166 pages

    Publisher

    Springer-Verlag

    Berlin, Heidelberg

    Publication History

    Published: 01 December 2010

    Author Tags

    1. Atomistic simulation
    2. Inverter
    3. Line-edge roughness
    4. Oxide thickness fluctuation
    5. Predictive modeling
    6. Random dopant fluctuation
    7. SRAM performance variability
    8. Threshold variation

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