article

Iterative roller imprint of multilayered nanostructures

Authors:

Keisuke Nagato,

Shuntaro Sugimoto,

Tetsuya Hamaguchi,

Masayuki NakaoAuthors Info & Claims

Microelectronic Engineering, Volume 87, Issue 5-8

Pages 1543 - 1545

https://doi.org/10.1016/j.mee.2009.11.029

Published: 01 May 2010 Publication History

Abstract

The authors demonstrated an iterative roller imprint method of multilayered nanostructures. A thermoplastic polymer film is imprinted using a nanostructured mold and heated rollers (first layer). The next imprinted thin film is thermally bonded on the backside of the first layer using other rollers. By repeating these processes, a multilayered nanostructure was fabricated. By this method, multilayered nanostructures with an 800nm pitch line-and-space pattern were fabricated using polymethyl-methacrylate film of 800nm thickness.

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Deshmukh SGoswami A(2022)Current innovations in roller embossing—a comprehensive reviewMicrosystem Technologies10.1007/s00542-022-05265-028:5(1077-1114)Online publication date: 1-May-2022
https://dl.acm.org/doi/10.1007/s00542-022-05265-0
Hishiki KNagato KTakahashi KHamaguchi TNakao M(2016)Real-time measurement of replication degree in thermal roller nanoimprintingMicroelectronic Engineering10.1016/j.mee.2016.03.053153:C(117-120)Online publication date: 5-Mar-2016
https://dl.acm.org/doi/10.1016/j.mee.2016.03.053
Mekaru HOhtomo ATakagi HKokubo MGoto H(2013)High-speed imprinting on plastic optical fibers using cylindrical mold with hybrid microstructuresMicroelectronic Engineering10.1016/j.mee.2013.03.036110(156-162)Online publication date: 1-Oct-2013
https://dl.acm.org/doi/10.1016/j.mee.2013.03.036
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Iterative roller imprint of multilayered nanostructures
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Published In

Microelectronic Engineering Volume 87, Issue 5-8

May, 2010

974 pages

ISSN:0167-9317

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Elsevier Science Ltd.

United Kingdom

Publication History

Published: 01 May 2010

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Deshmukh SGoswami A(2022)Current innovations in roller embossing—a comprehensive reviewMicrosystem Technologies10.1007/s00542-022-05265-028:5(1077-1114)Online publication date: 1-May-2022
https://dl.acm.org/doi/10.1007/s00542-022-05265-0
Hishiki KNagato KTakahashi KHamaguchi TNakao M(2016)Real-time measurement of replication degree in thermal roller nanoimprintingMicroelectronic Engineering10.1016/j.mee.2016.03.053153:C(117-120)Online publication date: 5-Mar-2016
https://dl.acm.org/doi/10.1016/j.mee.2016.03.053
Mekaru HOhtomo ATakagi HKokubo MGoto H(2013)High-speed imprinting on plastic optical fibers using cylindrical mold with hybrid microstructuresMicroelectronic Engineering10.1016/j.mee.2013.03.036110(156-162)Online publication date: 1-Oct-2013
https://dl.acm.org/doi/10.1016/j.mee.2013.03.036
Zhong ZShan XWong S(2011)Roll-to-roll large-format slot die coating of photosensitive resin for UV embossingMicrosystem Technologies10.5555/3112040.311240117:12(1703-1711)Online publication date: 1-Dec-2011
https://dl.acm.org/doi/10.5555/3112040.3112401

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Nanoimprint lithography with a soft roller and focused UV light for flexible substrates

Roll-to-roll UV imprint lithography for flexible electronics

Enhanced photo-patterning of polymer dielectrics via imprint lithography

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