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3D geometric simulation of MEMS fabrication processes: a semantic approach

Authors:

Hrishikesh Dixit,

Srikanth Kannapan,

Dean L. TaylorAuthors Info & Claims

SMA '97: Proceedings of the fourth ACM symposium on Solid modeling and applications

Pages 376 - 387

https://doi.org/10.1145/267734.267821

Published: 01 May 1997 Publication History

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References

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Cited By

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Li JGao SLiu Y(2018)Solid-based CAPP for surface micromachined MEMS devicesComputer-Aided Design10.1016/j.cad.2006.08.00639:3(190-201)Online publication date: 29-Dec-2018
https://dl.acm.org/doi/10.1016/j.cad.2006.08.006
Kanai SShibata TKawashima T(2014)Feature-Based 3D Process Planning for MEMS FabricationInternational Journal of Automation Technology10.20965/ijat.2014.p04068:3(406-419)Online publication date: 5-May-2014
https://doi.org/10.20965/ijat.2014.p0406
Li JLiu YLing HGuo WHe G(2012)Systematic Direct Solid Modeling Approach for Surface Micromachined MEMSAdvanced Materials Research10.4028/www.scientific.net/AMR.433-440.3130433-440(3130-3137)Online publication date: Jan-2012
https://doi.org/10.4028/www.scientific.net/AMR.433-440.3130
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3D geometric simulation of MEMS fabrication processes: a semantic approach

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SMA '97: Proceedings of the fourth ACM symposium on Solid modeling and applications

May 1997

387 pages

ISBN:0897919467

DOI:10.1145/267734

Chairmen:
Christoph Hoffmann
Purdue Univ., West Lafayette, IN
,
Wim Bronsvoort
Delft Univ., Delft, The Netherlands
,
George Allen
Delft Univ., Delft, The Netherlands
,
Mike Pratt
Delft Univ., Delft, The Netherlands
,
David Rosen
Delft Univ., Delft, The Netherlands

Permission to make digital or hard copies of all or part of this work for personal or classroom use is granted without fee provided that copies are not made or distributed for profit or commercial advantage and that copies bear this notice and the full citation on the first page. Copyrights for components of this work owned by others than ACM must be honored. Abstracting with credit is permitted. To copy otherwise, or republish, to post on servers or to redistribute to lists, requires prior specific permission and/or a fee. Request permissions from [email protected]

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Published: 01 May 1997

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4SSMA97: Fourth ACM SIGGRAPH Symposium on Solid Modeling and Applications

May 14 - 16, 1997

Georgia, Atlanta, USA

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Li JGao SLiu Y(2018)Solid-based CAPP for surface micromachined MEMS devicesComputer-Aided Design10.1016/j.cad.2006.08.00639:3(190-201)Online publication date: 29-Dec-2018
https://dl.acm.org/doi/10.1016/j.cad.2006.08.006
Kanai SShibata TKawashima T(2014)Feature-Based 3D Process Planning for MEMS FabricationInternational Journal of Automation Technology10.20965/ijat.2014.p04068:3(406-419)Online publication date: 5-May-2014
https://doi.org/10.20965/ijat.2014.p0406
Li JLiu YLing HGuo WHe G(2012)Systematic Direct Solid Modeling Approach for Surface Micromachined MEMSAdvanced Materials Research10.4028/www.scientific.net/AMR.433-440.3130433-440(3130-3137)Online publication date: Jan-2012
https://doi.org/10.4028/www.scientific.net/AMR.433-440.3130
Jian-hua LYu-sheng LShu-ming G(2005)Mask synthesis and verification based on geometric model for surface micro-machined MEMSJournal of Zhejiang University-SCIENCE A10.1631/jzus.2005.A10076:9(1007-1010)Online publication date: 1-Sep-2005
https://doi.org/10.1631/jzus.2005.A1007
Li JGao SLiu Y(2005)Feature-based process layer modeling for surface micromachined MEMSJournal of Micromechanics and Microengineering10.1088/0960-1317/15/3/02615:3(620-635)Online publication date: 14-Jan-2005
https://doi.org/10.1088/0960-1317/15/3/026
Chia TKannapan S(2005)Strategically mobile agentsMobile Agents10.1007/3-540-62803-7_31(149-161)Online publication date: 7-Jun-2005
https://doi.org/10.1007/3-540-62803-7_31
Li JGao SLiu Y(2004)Automated Generation of Layered Model for Surface Micro-machined MEMSComputer-Aided Design and Applications10.1080/16864360.2004.107382521:1-4(137-146)Online publication date: Jan-2004
https://doi.org/10.1080/16864360.2004.10738252
Qian XDutta D(2004)Feature-based design for heterogeneous objectsComputer-Aided Design10.1016/j.cad.2004.01.01236:12(1263-1278)Online publication date: Oct-2004
https://doi.org/10.1016/j.cad.2004.01.012
Sarma RAnanthasuresh GAnanthasuresh G(2003)Mask SynthesisOptimal Synthesis Methods for MEMS10.1007/978-1-4615-0487-0_9(267-295)Online publication date: 2003
https://doi.org/10.1007/978-1-4615-0487-0_9

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Single mask fabrication process for movable MEMS devices

MEMS fabrication by Lithography and Reactive Ion Etching (LIRIE)

Laser Direct-Write Fabrication of MEMS

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Single mask fabrication process for movable MEMS devices

MEMS fabrication by Lithography and Reactive Ion Etching (LIRIE)

Laser Direct-Write Fabrication of MEMS

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