research-article

Design and Simulation of Capacitive MEMS Switch for Ka Band Application

Authors:

Kuldeep Sharma,

Mohammed Abdella Kemal Academic Editor:

Vimal ShanmuganathanAuthors Info & Claims

Wireless Communications and Mobile Computing, Volume 2021

https://doi.org/10.1155/2021/2021513

Published: 01 January 2021 Publication History

Abstract

In this paper, RF MEMS switch with capacitive contact is designed and analyzed for Ka band application. A fixed-fixed beam/meander configuration has been used to design the switch for frequency band 10 GHz to 40 GHz. Electromagnetic and electromechanical analysis of three-dimensional (3D) structure/design has been analyzed in multiple finite element method (FEM) based full-wave simulator (Coventorware and high-frequency structure simulator). A comparative study has also been carried out in this work. The high resistivity silicon substrate (tanδ=0.010, ρ>8 kΩ−cm, εr=11.8) with a thickness of 675±25 μm has been taken for switch realization. The designed structure shows an actuation voltage of around 9.2 V. Impedance matching for the switch structure is well below 20 dB, loss in upstate, i.e., insertion loss >0.5 dB, and isolation of >25 dB throughout the frequency band is observed for the aforesaid structure. Furthermore, to increase the RF parameters, AIN dielectric material has been used instead of SiO₂ resulting in capacitance in downstate that increases hence improved the isolation. The proposed switch can be utilized in various potential applications such as any switching/tunable networks phased-array radar, reconfigurable antenna, RF phase shifter, mixer, biomedical, filter, and any transmitter/receiver (T/R) modules.

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cover image Wireless Communications & Mobile Computing

Wireless Communications & Mobile Computing Volume 2021, Issue

2021

14355 pages

ISSN:1530-8669

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Copyright © 2021 Vinay Bhatia et al.

This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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John Wiley and Sons Ltd.

United Kingdom

Publication History

Published: 01 January 2021

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Cited By

Chand CGautam AKumar MMaity RMaity N(2024)Analytical model and analysis of RF MEMS switch for Ka-band applicationsMicrosystem Technologies10.1007/s00542-023-05581-z30:1(117-125)Online publication date: 1-Jan-2024
https://dl.acm.org/doi/10.1007/s00542-023-05581-z
Percy JKanthamani S(2023)Revolutionizing wireless communicationMicroelectronics Journal10.1016/j.mejo.2023.105891139:COnline publication date: 1-Sep-2023
https://dl.acm.org/doi/10.1016/j.mejo.2023.105891
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