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Oxide traps characterization of 45 nm MOS transistors by gate current R.T.S. noise measurements

Published: 01 June 2005 Publication History

Abstract

A characterization of traps in ultrathin-oxide MOSFETs by low frequency noise measurements is presented. Drain and gate current noise measurements are investigated. 1/f drain noise magnitude allows extraction of slow oxide interface trap density. Random Telegraph Signal (R.T.S.) gate noise allows to extract properties of defects of the dielectric, such as trap energy level, cross section and its localization from the Si/Si0"2 interface.

References

[1]
Tsai, M.H., MA, T.P. and Hook, T.B., . IEEE Electron device letters. v15 i12. 504-506.
[2]
Simoens, E. and Clays, C., . Materials Science and Engineering. vB91-92. 136-143.
[3]
Boutchacha, T. and Ghibaudo, G., . Microelectronics Reliability. v42. 573-582.
[4]
B***uf, F., . IEDM.
[5]
Valenza, M., Hoffmann, A., Sodini, D., Laigle, A., Martinez, F. and Rigaud, D., . IEE Proc.-Circuits Devices Syst. v151 i2. 102-110.
[6]
Kirton, M.J. and Uren, M.J., . Advances Physics. v38 i4. 367-468.
[7]
***Trap competition inducing R.T.S. noise in saturation range in N-MOSFETs***, C. Leyris, A. Hoffmann, M. Valenza, J-C. Vildeuil, F. Roy, 3th Conf. Fluctuations and Noise, Texas 24-26 May 2005.
[8]
Amarasinghe, N., Celik-Butler, Z., Zlotnicka, A. and Wang, F., . Solid State Electronics. v47. 1443-1449.

Cited By

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  • (2010)Modeling the impact of RTS on the reliability of ring oscillatorsProceedings of the 23rd symposium on Integrated circuits and system design10.1145/1854153.1854187(128-133)Online publication date: 6-Sep-2010
  1. Oxide traps characterization of 45 nm MOS transistors by gate current R.T.S. noise measurements

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      Published In

      cover image Microelectronic Engineering
      Microelectronic Engineering  Volume 80, Issue
      June, 2005
      448 pages

      Publisher

      Elsevier Science Ltd.

      United Kingdom

      Publication History

      Published: 01 June 2005

      Author Tags

      1. 1/f noise
      2. MOSFETs
      3. R.T.S. fluctuations

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      • (2010)Modeling the impact of RTS on the reliability of ring oscillatorsProceedings of the 23rd symposium on Integrated circuits and system design10.1145/1854153.1854187(128-133)Online publication date: 6-Sep-2010

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