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Testing TSV-based three-dimensional stacked ICs

Published: 08 March 2010 Publication History

Abstract

To meet customer's product-quality expectations, each individual IC needs to be tested for manufacturing defects incurred during its many high-precision, and hence defect-prone manufacturing steps; these tests should be both effective and cost-efficient. The semiconductor industry is preparing itself now for three-dimensional stacked ICs (3D-SICs) based on Through-Silicon Vias (TSVs), which, due to their many compelling benefits, are quickly gaining ground. Test solutions need to be ready for this new generation of 'super chips'. 3D-SICs are chips where all basic, as well as most advanced test technologies come together. In addition, they pose some truly new test challenges with respect to complexity and cost, due to their advanced manufacturing processes and physical access limitations. This presentation focuses on the available solutions and still open challenges for testing 3D-SICs. It discusses flows for wafer-level and package-level tests, the challenges with respect to test contents and wafer-level probe access, and the on-chip Design-for-Test (DfT) infrastructure required for 3D-SICs.

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Cited By

View all
  • (2022)A Cost-Effective Built-In Self-Test Mechanism for Post-Manufacturing TSV Defects in 3D ICsACM Journal on Emerging Technologies in Computing Systems10.1145/351780818:4(1-23)Online publication date: 20-Apr-2022
  • (2015)An Effective TSV Self-Repair Scheme for 3D-Stacked ICsProceedings of the 25th edition on Great Lakes Symposium on VLSI10.1145/2742060.2742071(21-26)Online publication date: 20-May-2015
  • (2014)Interconnect test for 3D stacked memory-on-logicProceedings of the conference on Design, Automation & Test in Europe10.5555/2616606.2616761(1-6)Online publication date: 24-Mar-2014
  • Show More Cited By

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Published In

cover image ACM Conferences
DATE '10: Proceedings of the Conference on Design, Automation and Test in Europe
March 2010
1868 pages
ISBN:9783981080162

Sponsors

  • EDAA: European Design Automation Association
  • ECSI
  • EDAC: Electronic Design Automation Consortium
  • SIGDA: ACM Special Interest Group on Design Automation
  • The IEEE Computer Society TTTC
  • The IEEE Computer Society DATC
  • The Russian Academy of Sciences: The Russian Academy of Sciences

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European Design and Automation Association

Leuven, Belgium

Publication History

Published: 08 March 2010

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DATE '10
Sponsor:
  • EDAA
  • EDAC
  • SIGDA
  • The Russian Academy of Sciences
DATE '10: Design, Automation and Test in Europe
March 8 - 12, 2010
Germany, Dresden

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Overall Acceptance Rate 518 of 1,794 submissions, 29%

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Cited By

View all
  • (2022)A Cost-Effective Built-In Self-Test Mechanism for Post-Manufacturing TSV Defects in 3D ICsACM Journal on Emerging Technologies in Computing Systems10.1145/351780818:4(1-23)Online publication date: 20-Apr-2022
  • (2015)An Effective TSV Self-Repair Scheme for 3D-Stacked ICsProceedings of the 25th edition on Great Lakes Symposium on VLSI10.1145/2742060.2742071(21-26)Online publication date: 20-May-2015
  • (2014)Interconnect test for 3D stacked memory-on-logicProceedings of the conference on Design, Automation & Test in Europe10.5555/2616606.2616761(1-6)Online publication date: 24-Mar-2014
  • (2014)Contactless Stacked-die Testing for Pre-bond InterposersProceedings of the 51st Annual Design Automation Conference10.1145/2593069.2593111(1-6)Online publication date: 1-Jun-2014
  • (2013)High-throughput TSV testing and characterization for 3D integration using thermal mappingProceedings of the 50th Annual Design Automation Conference10.1145/2463209.2488823(1-6)Online publication date: 29-May-2013
  • (2012)Challenges and emerging solutions in testing TSV-based 2 1/2D- and 3D-stacked ICsProceedings of the Conference on Design, Automation and Test in Europe10.5555/2492708.2493023(1277-1282)Online publication date: 12-Mar-2012
  • (2012)Kth-Aggressor Fault (KAF)-based Thru-Silicon-Via Interconnect Built-In Self-Test and DiagnosisJournal of Electronic Testing: Theory and Applications10.1007/s10836-012-5322-328:6(817-829)Online publication date: 1-Dec-2012

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