Towards realization of a high-fidelity simulation model for short-term horizon forecasting in wafer fabrication facilities

Discrete Event Simulation (DES) has widely been used for mid and long term forecasting in wafer fabrication plants. But the use of DES for short term forecasting has been limited due to the perceived modelling and computation complexity as well as the non-steady state nature of today's wafer fab operations. In this paper, we discuss some important modelling issues associated with building an online simulation model. Key elements considered are actual process routes, process and throughput modelling as a function of equipment behavior, lot size, and available processing modules, process dedication at equipment level, equipment downs at mainframe level, estimated lot release strategy, send ahead wafers, dispatch rules, and setup. Typical application areas are proactive dedication management, preventive maintenance scheduling and WIP based sampling optimization.