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Building a Digital Twin of the Photolithography Area of a Real-World Wafer Fab to Validate Improved Production Control

Published: 02 March 2023 Publication History

Abstract

Since the photolithography area is generally the bottleneck of a wafer fab, effective scheduling in this area can increase the performance of the complete fab significantly. However, the potential benefit of proposed solution methods is often validated in a static and deterministic scheduling setting, while the manufacturing environment is dynamic and stochastic. In this paper, we build a discrete-event simulation model based on real-world data of the photolithography area, which can be used to accurately determine the performance of new scheduling solutions. A case study at a global semiconductor manufacturer is presented. The simulation model, a so-called digital twin, captures the vast majority of the stochastic behavior such as the arrival of jobs, processing times, setup times and machine downs. In addition, a dispatching heuristic is developed to replicate the current practice of production control. Both the simulation model and the dispatching heuristic are validated and shown to be accurate.

References

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Doleschal, D., G. Weigert, A. Klemmt, and F. Lehmann. 2013. "Advanced Secondary Resource Control in Semiconductor Lithography Areas: From Theory to Practice". In Proceedings of the 2013 Winter Simulations Conference, edited by Raghu Pasupathy, Seong-He Kim, Andreas Tolk, Raymond R. Hill, and Michael E. Kuhl, 3879--3890. Piscataway, New Jersey: Institute of Electrical and Electronics Engineers, Inc.
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Sarin, S. C., A. Varadarajan, and L. Wang. 2011. "A Survey of Dispatching Rules for Operational Control in Wafer Fabrication". Production Planning and Control 22:4--24.
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Sun, X., J. S. Noble, and C. M. Klein. 1999. "Single-machine Scheduling with Sequence Dependent Setup to Minimize Total Weighted Squared Tardiness". IIE Transactions 31(2):113--124.

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cover image ACM Conferences
WSC '22: Proceedings of the Winter Simulation Conference
December 2022
3536 pages

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  • IIE: Institute of Industrial Engineers
  • INFORMS-SIM: Institute for Operations Research and the Management Sciences: Simulation Society
  • SCS: Society for Computer Simulation

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IEEE Press

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Published: 02 March 2023

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WSC '22
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WSC '22: Winter Simulation Conference
December 11 - 14, 2022
Singapore, Singapore

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