Microelectronic Engineering

The fabrication process of semiconductor is more and more difficult as scaling down. Especially, the via profile formation is one of the main challenges which is suffering from making stable device process because ArF photo resist (PR) itself can not ...

We present a systematic investigation of cell culture on nanoporous surfaces with and without geometry constrains. Nanopores of anodic aluminum oxides (AAO) of different pore sizes were produced using a temperature controlled two-step anodization. NIH ...

Thermal Soft UV nanoimprint lithography (NIL) was performed to replicate nanostructures in SU-8 resist. The SU-8 resist was structured with a PDMS stamp molded against an original silicon master which comported gratings of lines (500nm width/1@mm pitch)...

We report a simple method for the fabrication of high density metallic nanowires and nanotubes by electrodeposition using polycarbonate (PC) and anodic aluminum oxide (AAO) membrane as templates. The diameters and the aspect ratio of the fabricated ...

This work focuses on the realization of three different micro-actuators that will be integrated in a lab-on-chip for bioaffinity assays. The aim is to create a microfluidic network to control the sample and reagent delivery as well as the washing cycles ...

An automated and reliable isolation of single cells is increasingly important for applications in the rapidly growing life science sector. Traditional methods, like limited dilution or cell-seeding in semi-solid media, are time-consuming, significantly ...

This paper presents a silicon MEMS based capacitive sensing array, which has the ability to resolve forces in the sub mN range, provides directional response to applied loading and has the ability to differentiate between surface textures. Texture ...

We report on the use of a carbon-rich Pt-based material, obtained by electron and ion beam assisted deposition from metal-organic precursor, as a mask for pattern transfer processes. Thin and narrow mask patterns subjected to oxygen plasma and reactive ...

A method to fabricate microstructures that are ideal for optical applications was developed. This method enabled structures with a high aspect ratio to be fabricated from an amorphous perfluorinated polymer, CYTOP, which has an identical refractive ...

We report on a fully CMOS compatible fabrication method for ambipolar silicon nanowire FinFETs. The low thermal budget processing, compatible with monolithic 3D device integration, makes use of low pressure chemical vapor deposition (LPCVD) of amorphous ...

Stencil lithography (SL) is a shadow mask technique which allows parallel, resistless, micro- and nano-patterning of material through apertures created in a membrane (stencil) onto a substrate. The stencils are usually made of LPCVD low-stress SiN due ...

Combining the nanoporous anodic aluminum oxide (AAO) technique with soft lithography constitutes a highly reproducible and quick method for large-area nanopatterning, with increasing potential for applications in biology. The AAO templates were used as ...

The Young's modulus of thin films can be determined by deposition on a micronsized Si cantilever and measuring the resonance frequency before and after deposition. The accuracy of the method depends strongly on the initial determination of the ...

A novel dome-shaped and anti-reflective microdome array (MDA) was developed for a solar cell surface protection layer with the aim to improve the cell efficiency. Uniform microdomes in the array were obtained by isotropic wet-etching of quartz. The ...

To obtain higher throughput of more than 5wafer per hour (WPH), authors propose a high throughput 50kV e-beam direct writer MCC8 that has eight column. MCC8 has multi column cell (MCC), character projection (CP) with design for e-beam (DFEB) and high ...

This work describes the design and micromachining of all-SU-8 structures for a bio-mimetic flying micro-air-vehicle. The design based on simple analytical and finite-element model was briefly discussed to understand and optimize the structural sizes. ...

Thanks to the great progress of micro and nanofabrication techniques, only in recent years it has been possible to propose a space flying instrument able of remote-sensing the surface released neutral particles with a direct technique. This instrument, ...

In order to simplify the nanoimprint process and allow thick metal sacrificial layer deposition for high-aspect-ratio etching, a transfer imprint lithography technique is introduced. A metal layer is deposited on PDMS mold, and it is subsequently ...

This work presents the design, fabrication and characterization of a polymer based stretchable electrode for cell monitoring. The final goal is the development of innovative bio-hybrid skin-like tactile sensors with mammalian cells as core biological ...

Thermopile detectors are particularly well suited for spectral imaging, space science applications, track recording, presence detection and applications with low energy consumption. The purpose of this work is the fabrication of a surface-micromachined ...

This paper describes the creation of a pneumatically driven single-cell trap and its ability to trap a live single cell. The cell-trap device consists of a pneumatic vibrator array and a trap chamber used to trap single cells. The entire structure was ...

This paper proposes a new concept of a RNIL (roller nanoimprint lithography) system. The system does not require the roll stamp that is necessary in the conventional RNIL system, and it easily transfers patterns from a hard stamp to a flexible ...

The electrical properties of lateral ultra-fine tungsten nanowires, which were grown by focused-ion-beam-induced deposition with 1pA ion-beam current, were investigated. Temperature-dependent electrical measurements show that the wires are conducting ...

In this contribution cross coupled beams MEMS resonator is presented in order to excite second in-plane flexural mode and provide more transduction area than a single beam in order to enhance the electrostatic signal measurement employing capacitive ...

We present a simple method that combines self-assembled nanosphere lithography (SANL) and photo-assisted electrochemical etching (PAECE) to fabricate near-perfect and orderly arranged nanopillar arrays for the direct methanol fuel cells electrode (DMFCs)...

In order to overcome roughening and charging of the Zerodur(R) substrate for extreme ultra violet lithography (EUVL) optics during 0.5-10keV Ar^+ ion beam machining, we had already proposed a method in which a thin Si layer was deposited on the Zerodur(...

In obtaining an image in a scanning microscope many kinds of noise are involved. This noise has a large influence on the image of the sample. In this research, we propose a method for improving image quality by applying dither signal injection. This ...

In this study dual cantilever resistive probes for scanning thermal microscopy (SThM) have been batch fabricated. In the dual probe, one is used as local heater and a second one nearby detects the thermal diffusivity at a microscopic scale. Various ...

We present the fabrication of large nanodot arrays with very small single dot sizes made of different metals and on different substrates using e-beam lithography and lift-off techniques. Nanodot arrays have a high potential for bioanalytical ...

Microfluidic devices with bi-layer substrates of different stiffness but the same surface chemistry were used for cell culture studies. Whereas the proposed microfluidic culture platform is advantageous for data collection and minimum consumption of ...