Cu seed step coverage evolution with target lifetime for long-throw self ionized physical vapor deposition chambers
- Elisa Pegoraro,
- Alberto Perrotta,
- Gianpaolo Lorito,
- Laura Bertarelli,
- Benoit-Noel Bozon,
- Dan Deyo,
- Valerio Spreafico
The major approach for the deposition of Cu seed layers in copper interconnects is physical vapor deposition (PVD), with a self-ionized plasma (SIP) approach. However, the cutting-edge technologies still lack a full characterization of ...
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Highlights
- Robustness of Cu processes by SIP co-resputtering approaches are investigated.
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Fabrication and oxidation of amorphous Zr-based alloy for imprint lithography
As nanoimprint lithography provides promising potential in industrial manufacture, it is highly desirable to fabricate a flexible mold with good surface hardness and corrosion resistance. In this work, a nano-patterned template with ...
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Highlights
- Amorphous alloy based flexible template is fabricated for nanoimprint lithography.
Static and dynamic interaction between polyvinyl acetal brushes and flat surfaces—Measuring near-surface brush volume ratio and nodule volume change for moving brushes
The cleaning mechanism for brush scrubbing, known as the contact-type cleaning method, utilizes the direct contact of impurities onto brushes or brush-induced fluid flow depending on the contact condition. Applying brush cleaning to ...
Graphical abstractThree dimensional near surface brush structure.
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Highlights
- Development of measuring method for the near-surface brush volume ratio and brush volume change during rotation.
Patterning a cellulose based dual-tone photoresist via deep X-ray lithography
The desire to combine properties such as ready availability, low price and biodegradability makes cellulose derivatives such as Trimethylsilyl cellulose (TMSC) an ideal precursor suited to study different applications on the abundant ...
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Highlights
- A cellulose based precursor used as a dual-tone photoresist patterned with DXRL.
A tensile test for freestanding low-k thin films using a lift-off technique
Since decreasing dielectric constants of insulators greatly alleviates the RC-delay, the materials with low/ultra-low-k dielectric (LK/ULK) constant have been integrated into the back end of line (BEOL) of advanced chips. However, the ...
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Highlights
- A lift-off technique used to obtain freestanding test samples of low-k thin film is proposed.
Fabrication of color-toned micro/nanopattern surface by submerged photosynthesis method
Nanosurface patterning can be advantageous for novel opto-electrical devices application. In this study, we utilized the electron beam lithography (EBL) technique to fabricate ZnO nanorods(NRs)/ZnO/Si surface nanopatterning via ...
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Highlights
- EBL technique for ZnO NRs/ZnO/Si surface patterning via G-SPSC.
- Successful ZnO ...
Realization of ppb-level acetone detection using noble metals (Au, Pd, Pt) nanoparticles loaded GO FET sensors with simultaneous back-gate effect
In the current study, graphene oxide (GO), uniformly loaded with different noble metal nanoparticles (Au, Pd and Pt) were synthesized by spray coating technique and implemented in field effect transistor (FET) sensors. The morphology, ...
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Highlights
- Noble metal nanoparticles (Au, Pd and Pt) functionalized GO channel.
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A self-supported structure hybrid triboelectric/piezoelectric nanogenerator for bio-mechanical energy harvesting and pressure sensing
Recently, nanogenerators (NGs) based on triboelectric effect and piezoelectric effect have attracted worldwide attention. However, the development of NGs still faces many challenges, including reasonable structural design, multi-...
