Spurious mid-spatial frequency structure on optical surfaces reconstructed from surface slope measurements

Yue Dong; Zahra Hosseinimakarem; Angela Davies; Chris J. Evans

doi:10.1117/12.2061247

18 August 2014 Spurious mid-spatial frequency structure on optical surfaces reconstructed from surface slope measurements

Yue Dong, Zahra Hosseinimakarem, Angela Davies, Chris J. Evans

Author Affiliations +

Proceedings Volume 9203, Interferometry XVII: Techniques and Analysis; 92030G (2014) https://doi.org/10.1117/12.2061247
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

Mid-spatial frequency structure on an optical surface induces small-angle scatter in the transmitted wavefront. Freeform surfaces are particularly susceptible to mid-spatial frequency errors due to the sub-aperture nature of the fabrication processes. Several surface metrology methods that work for freeform surfaces use an indirect principle, reconstructing the surface shape from measured surface slope data. The integration process in the presence of measurement noise adds a spatial correlation to the dataset, leading to spurious spatial frequency structure. In this paper, we use the autocorrelation function to characterize and evaluate this artificial mid-spatial frequency structure on optical surfaces that are reconstructed by zonal integration methods.

Citation Download Citation

Yue Dong, Zahra Hosseinimakarem, Angela Davies, and Chris J. Evans "Spurious mid-spatial frequency structure on optical surfaces reconstructed from surface slope measurements", Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 92030G (18 August 2014); https://doi.org/10.1117/12.2061247

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