Precise stage design with planar diffraction grating interferometer

Haojie Xia; Yetai Fei

doi:10.1117/12.885215

28 December 2010 Precise stage design with planar diffraction grating interferometer

Haojie Xia, Yetai Fei

Author Affiliations +

Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 754411 (2010) https://doi.org/10.1117/12.885215
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China

Abstract

Planar cross diffraction grating can be adopted to measure displacement as scale. In this paper, Planar grating interferometer configuration for precise displacement measurements is introduced, and the principle of interferometer based on polarization optics is deduced. According to 2-D grating interferometer structure, error sources are analyzed, and the pitch and yaw of 2-D grating guide caused by planar guide's non-linearity is the main factors to decrease the measurement system's accuracy. With grating interferometer error sources analysis, precise planar stage is proposed to integrate with the gating interferometer, the stage is compact and can minimize abbe error in structure. The methods of calibration and error compensation are employed to improve the position accuracy of the stage. As experiments show, the stage position repeatability is less than 0.1um.

Citation Download Citation

Haojie Xia and Yetai Fei "Precise stage design with planar diffraction grating interferometer", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 754411 (28 December 2010); https://doi.org/10.1117/12.885215

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE