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Stochastic interconnect layout sensitivity model

Published: 17 March 2007 Publication History

Abstract

Semiconductor manufacturing yield is determined by the defect density and critical area i.e. that portion of the layout in which the occurrence of a defect results in yield loss. In this paper, we define layout sensitivity as the ratio of critical area to the layout area. Utilizing the basic probability theory, a rigorous derivation of layout sensitivity for random logic network is performed. This model is compared to actual critical area distributions for a modern microprocessor design. A methodology to calculate the layout sensitivity pattern for a complex layout is proposed.

References

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F. Lee, A. Ikeuchi, Y. Tsukiboshi, and T. Ban, "Critical Area Optimizations Improve IC Yields", on line EE Times, Jan. 9, 2006.
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J. P. de Gyvez, "Yield Modeling and BEOL Fundamentals", International Workshop on System Level Interconnect Prediction (SLIP), April 2001, pp. 135--163.
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D. K. de Vries and P. L. C. Simon, "Calibration of Open Interconnect Yield Models," IEEE International Symposium on Defect and Fault Tolerance in VLSI Systems, Nov. 2003, pp. 26--33.
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A. Nardi and A. L. Vincentelli, "Logic Synthesis for Manufacturability," IEEE Design & Test of Computers, May-June 2004, pp. 192--199.
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C. H. Stapper, "Modeling of Integrated Circuit Defect Sensitivity," IBM Journal of Research and Development, Nov. 1983, pp. 549--557.
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J. Segal, S. Parker, S. Bakarian, and J. Pak, "Critical Area Based Modeling on an Advanced Microprocessor Design," International Symposium on Semiconductor Manufacturing, May 2000, pp. 191--194.
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P. Christie and J. P. de Gyvez, "Pre-Layout Prediction of Interconnect Manufacturability," International Workshop on System Level Interconnect Prediction (SLIP), April 2001, pp. 167--173.
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Cited By

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  • (2010)Logic Gate Failure Characterization for Nanoelectronic EDA ToolsProceedings of the 2010 IEEE 25th International Symposium on Defect and Fault Tolerance in VLSI Systems10.1109/DFT.2010.9(16-23)Online publication date: 6-Oct-2010
  • (2009)A stochastic-based efficient critical area extractor on OpenAccess platformProceedings of the 19th ACM Great Lakes symposium on VLSI10.1145/1531542.1531592(197-202)Online publication date: 10-May-2009
  • (2009)Random Yield Prediction Based on a Stochastic Layout Sensitivity ModelIEEE Transactions on Semiconductor Manufacturing10.1109/TSM.2009.202482122:3(329-337)Online publication date: Aug-2009
  • Show More Cited By

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cover image ACM Conferences
SLIP '07: Proceedings of the 2007 international workshop on System level interconnect prediction
March 2007
120 pages
ISBN:9781595936226
DOI:10.1145/1231956
Permission to make digital or hard copies of all or part of this work for personal or classroom use is granted without fee provided that copies are not made or distributed for profit or commercial advantage and that copies bear this notice and the full citation on the first page. Copyrights for components of this work owned by others than ACM must be honored. Abstracting with credit is permitted. To copy otherwise, or republish, to post on servers or to redistribute to lists, requires prior specific permission and/or a fee. Request permissions from [email protected]

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Association for Computing Machinery

New York, NY, United States

Publication History

Published: 17 March 2007

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Author Tags

  1. critical area analysis
  2. defect density
  3. design for manufacturability
  4. layout sensitivity
  5. reliability
  6. stochastic model
  7. yield

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Overall Acceptance Rate 6 of 8 submissions, 75%

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Cited By

View all
  • (2010)Logic Gate Failure Characterization for Nanoelectronic EDA ToolsProceedings of the 2010 IEEE 25th International Symposium on Defect and Fault Tolerance in VLSI Systems10.1109/DFT.2010.9(16-23)Online publication date: 6-Oct-2010
  • (2009)A stochastic-based efficient critical area extractor on OpenAccess platformProceedings of the 19th ACM Great Lakes symposium on VLSI10.1145/1531542.1531592(197-202)Online publication date: 10-May-2009
  • (2009)Random Yield Prediction Based on a Stochastic Layout Sensitivity ModelIEEE Transactions on Semiconductor Manufacturing10.1109/TSM.2009.202482122:3(329-337)Online publication date: Aug-2009
  • (2009)A Layout Sensitivity Model for Estimating Electromigration-vulnerable Narrow InterconnectsJournal of Electronic Testing: Theory and Applications10.1007/s10836-008-5079-x25:1(67-77)Online publication date: 1-Feb-2009
  • (2007)Estimation of Electromigration-Aggravating Narrow Interconnects Using a Layout Sensitivity Model22nd IEEE International Symposium on Defect and Fault-Tolerance in VLSI Systems (DFT 2007)10.1109/DFT.2007.12(59-67)Online publication date: Sep-2007

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