Research on the Time Drift Stability of Differential Inductive Displacement Sensors with Frequency Output
Abstract
:1. Introduction
2. Measurement and Different Operations for Digitalization
2.1. DIFOD Sensor Measurement Principle
2.2. Differential Operation Principles and Signal Conditioning
2.2.1. Signal Conditioning and Digitalization Based on Discrete Devices and PCB Boards
2.2.2. Signal Conditioning and Digitalization Based on LDC Chips
3. Experimental Rig and Testing
3.1. Experimental Setup and Different Displacement Sensors
3.2. Sensors Probe Structure and Materials
3.3. Comparison Experiment of Different Signal Conditioning Circuits
3.3.1. Time Drift or Stability under Controlled Temperatures
3.3.2. Comparison of Experiments with Different Sensor Fixtures and Different Sensors
4. Conclusions and Future Work
- (1)
- The magnetic field of the two coils is well isolated using the magnetic shield ring and the copper bush. They effectively reduce the traction between the magnetic fields of the two coils and improve the sensitivity and quality factors of the sensor. The probe with improved probe structure and material, using a signal conditioning circuit based on a discrete device, meets the time drift RMS requirement of 0.01 μm/24 h following 24 h after installation.
- (2)
- The time drift stability of the sensor systems, using a signal conditioning circuit based on a discrete device, is better than that of the sensor using LDC chips due to the different sensor coil excitation methods. Sensors using LDC chips can provide better consistency stability due to the chip integrating resonance circuit and frequency measurement module.
- (3)
- The experimental fixture has an impact on the stability or time drift of the DIFOD sensor; the sensor fixed on the BCT-1C takes longer to be stabilized than the sensor fixed on the micro-displacement actuator due to fewer drift factors. This finding is helpful when choosing an experimental fixture for future temperature compensation.
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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Parts | Parameters | Value |
---|---|---|
Coil skeleton | Length (mm) | 14.5 |
Outer diameter (mm) | 5.2 | |
material | Aluminum nitride ceramics | |
Coil distance (mm) | 4.0 | |
Coil 1 | Wire diameter (mm) | 0.1 |
Number of turns Material | 90 Copper | |
Coil 2 | Wire diameter (mm) | 0.1 |
Number of turns Material | 120 Copper | |
Magnetic Cores 1 and 2 | Core length (mm) | 3.0 |
Outer diameter (mm) Material | 2.5 Ferrite core | |
Magnetic shield ring | Length (mm) | 14.5 |
Inner diameter (mm) | 5.5 | |
Outer diameter (mm) Material | 9.5 Nickel Zinc ferrite |
Parameters | BCT-5C | BCT-1C |
---|---|---|
Displacement resolution | 0.2 μm | 1.0 μm |
Measuring range | 0~0.4 mm | 0~2.0 mm |
Measuring error | ±0.12~±0.2 μm | ±0.5~±3.0 μm |
Slope of the inclined block | 1:50 | 1:10 |
Types of Displacement Sensors | Signal Conditioning (Oscillators) Circuits | Sensor Probes with Differential Structure | Experiment Setup in the Test Chamber |
---|---|---|---|
PCB circuit sensor | | | |
LDC-based sensor | | | |
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Lu, X.; Tian, G.; Wang, Z.; Li, W.; Yang, D.; Li, H.; Wang, Y.; Ni, J.; Zhang, Y. Research on the Time Drift Stability of Differential Inductive Displacement Sensors with Frequency Output. Sensors 2022, 22, 6234. https://doi.org/10.3390/s22166234
Lu X, Tian G, Wang Z, Li W, Yang D, Li H, Wang Y, Ni J, Zhang Y. Research on the Time Drift Stability of Differential Inductive Displacement Sensors with Frequency Output. Sensors. 2022; 22(16):6234. https://doi.org/10.3390/s22166234
Chicago/Turabian StyleLu, Xiaolong, Guiyun Tian, Zongwen Wang, Wentao Li, Dehua Yang, Haoran Li, You Wang, Jijun Ni, and Yong Zhang. 2022. "Research on the Time Drift Stability of Differential Inductive Displacement Sensors with Frequency Output" Sensors 22, no. 16: 6234. https://doi.org/10.3390/s22166234