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Condensed Matter > Mesoscale and Nanoscale Physics

arXiv:1407.5413 (cond-mat)
[Submitted on 21 Jul 2014]

Title:PtSi Clustering In Silicon Probed by Transport Spectroscopy

Authors:Massimo Mongillo, Panayotis Spathis, Georgios Katsaros, Riccardo Rurali, Xavier Cartoixa, Pascal Gentile, Silvano de Franceschi
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Abstract:Metal silicides formed by means of thermal annealing processes are employed as contact materials in microelectronics. Control of the structure of silicide/silicon interfaces becomes a critical issue when the device characteristic size is reduced below a few tens of nanometers. Here we report on silicide clustering occurring within the channel of PtSi/Si/PtSi Schottky barrier transistors. This phenomenon is investigated through atomistic simulations and low-temperature resonant tunneling spectroscopy. Our results provide evidence for the segregation of a PtSi cluster with a diameter of a few nanometers from the silicide contact. The cluster acts as metallic quantum dot giving rise to distinct signatures of quantum transport through its discrete energy states.
Subjects: Mesoscale and Nanoscale Physics (cond-mat.mes-hall)
Cite as: arXiv:1407.5413 [cond-mat.mes-hall]
  (or arXiv:1407.5413v1 [cond-mat.mes-hall] for this version)
  https://doi.org/10.48550/arXiv.1407.5413
Journal reference: Physical Review X 3, 041025 (2013)
Related DOI: https://doi.org/10.1103/PhysRevX.3.041025

Submission history

From: Massimo Mongillo [view email]
[v1] Mon, 21 Jul 2014 08:37:31 UTC (326 KB)
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