Condensed Matter > Superconductivity
[Submitted on 19 Aug 2014 (v1), last revised 15 Jun 2016 (this version, v3)]
Title:Aluminium-oxide wires for superconducting high kinetic inductance circuits
View PDFAbstract:We investigate thin films of conducting aluminium-oxide, also known as granular aluminium, as a material for superconducting high quality, high kinetic inductance circuits. The films are deposited by an optimised reactive DC magnetron sputter process and characterised using microwave measurement techniques at milli-Kelvin temperatures. We show that, by precise control of the reactive sputter conditions, a high room temperature sheet resistance and therefore high kinetic inductance at low temperatures can be obtained. For a coplanar waveguide resonator with 1.5\,k$\Omega$ sheet resistance and a kinetic inductance fraction close to unity, we measure a quality factor in the order of 700\,000 at 20\,mK. Furthermore, we observe a sheet resistance reduction by gentle heat treatment in air. This behaviour is exploited to study the kinetic inductance change using the microwave response of a coplanar wave guide resonator. We find the correlation between the kinetic inductance and the sheet resistance to be in good agreement with theoretical expectations.
Submission history
From: Hannes Rotzinger [view email][v1] Tue, 19 Aug 2014 14:12:05 UTC (1,448 KB)
[v2] Fri, 26 Sep 2014 14:31:38 UTC (1,448 KB)
[v3] Wed, 15 Jun 2016 14:51:59 UTC (1,322 KB)
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