This paper proposes a new non-destructive methodology to estimate physical parameters for LSIs. In order to resolve the estimation accuracy degradation issue for low-k dielectric films, we employ a parallel-plate capacitance measurement and a wire resistance measurement in our non-destructive method. Due to (1) the response surface functions corresponding to the parallel-plate capacitance measurement and the wire resistance measurement and (2) the searching of the physical parameter values using our cost function and simulated annealing, the proposed method attains higher precision than that of the existing method. We demonstrate the effectiveness of our method by application to our 90 nm SoC process using low-k materials.

An on-chip, 64-Mb, embedded, DRAM MPEG-2 encoder LSI with a multimedia processor has been developed. To implement this large-scale and high-speed LSI, we have developed the hierarchical skew control of multi-clocks, with timing verification, in which cross-talk noise is considered, and simple measures taken against the IR drop in the power lines through decoupling capacitors. As a result, the target performance of 263 MHz at 1.5 V has been successfully attained and verified, the cross-talk noise has been considered, and, in addition, it has become possible to restrain the IR drop to 166 mV in the 162 MHz operation block.

This paper describes a chip set architecture and its implementation for programmable MPEG2 MP@ML (main profile at main level) video encoder. The chip set features a functional partitioning architecture based on the MPEG2 layer structure. Using this partitioning scheme, an optimized system configuration with double bus structure is proposed. In addition, a hybrid architecture with dual video-oriented on-chip RISC processors and dedicated hardware and a hierarchical pipeline scheme covering all layers are newly introduced to realize flexibility. Also, effective motion estimation is achieved by a scalable solution for high picture quality. Adopting these features, three kinds of VLSI have been developed using 0. 5 micron double metal CMOS technology. The chip set consists of a controller-LSI (C-LSI), a macroblock level pixel processor-LSI (P-LSI) and a motion estimation-LSI (ME-LSI). The chip set combined with synchronous DRAMs (SDRAM) supports all the layer processing including rate-control and realizes real-time encoding for ITU-R-601 resolution video (720480 pixels at 30 frames/s) with glue less logic. The exhaustive motion estimation capability is scalable up to 63. 5 and 15. 5 in the horizontal and vertical directions respectively. This chip set solution realizes a low cost MPEG2 video encoder system with excellent video quality on a single PC extension board. The evaluation system and application development environment is also introduced.