The electrical and mechanical response of radio frequency (RF) microelectromechanical systems (ME... more The electrical and mechanical response of radio frequency (RF) microelectromechanical systems (MEMS) switches depends critically on the profile of the released structure. Stress gradients within the material can significantly alter the structural profile thereby changing the spring constant and the resulting switch release times. To investigate the influence of metal stress on spring constant and release time, a series of
Synthesis of crystalline MgGeN2 thin solid films is achieved using the technique of molecular bea... more Synthesis of crystalline MgGeN2 thin solid films is achieved using the technique of molecular beam epitaxy (MBE). The details of the epitaxial process are described. The microstructures of these films are investigated by both x-ray diffraction (XRD) and cross-sectional transmission electron microscopy (XTEM). Comparison of the lattice structure with powder diffraction standards suggests the lattice structure may be orthorhombic with a high degree of texture. Morphology is evaluated by atomic force microscopy, and a periodic pattern of growth mounds is observed. A formalism for dynamical roughening is applied to quantify the mounded surface features. Mounds are found to have an average spacing of 235 nm, and the surface exhibits a saturation value of 22 nm for the root mean correlated height difference. Diffusion bias is discussed as a mechanism for the formation of surface mounds.
Journal of Micromechanics and Microengineering, 2003
... Microeng. 8 293300 [7] Tabata O, You H, Matsuzuka N, Yamaji T, Uemura S and Dama I 2002 Movi... more ... Microeng. 8 293300 [7] Tabata O, You H, Matsuzuka N, Yamaji T, Uemura S and Dama I 2002 Moving mask deep X-ray lithography system with multi state for 3-D microfabrication Microsystems Technologies 8 938 [8] Ryan Turner 2002 Tapered LIGA mold insert MS Thesis ...
The electrical and mechanical response of radio frequency (RF) microelectromechanical systems (ME... more The electrical and mechanical response of radio frequency (RF) microelectromechanical systems (MEMS) switches depends critically on the profile of the released structure. Stress gradients within the material can significantly alter the structural profile thereby changing the spring constant and the resulting switch release times. To investigate the influence of metal stress on spring constant and release time, a series of
Synthesis of crystalline MgGeN2 thin solid films is achieved using the technique of molecular bea... more Synthesis of crystalline MgGeN2 thin solid films is achieved using the technique of molecular beam epitaxy (MBE). The details of the epitaxial process are described. The microstructures of these films are investigated by both x-ray diffraction (XRD) and cross-sectional transmission electron microscopy (XTEM). Comparison of the lattice structure with powder diffraction standards suggests the lattice structure may be orthorhombic with a high degree of texture. Morphology is evaluated by atomic force microscopy, and a periodic pattern of growth mounds is observed. A formalism for dynamical roughening is applied to quantify the mounded surface features. Mounds are found to have an average spacing of 235 nm, and the surface exhibits a saturation value of 22 nm for the root mean correlated height difference. Diffusion bias is discussed as a mechanism for the formation of surface mounds.
Journal of Micromechanics and Microengineering, 2003
... Microeng. 8 293300 [7] Tabata O, You H, Matsuzuka N, Yamaji T, Uemura S and Dama I 2002 Movi... more ... Microeng. 8 293300 [7] Tabata O, You H, Matsuzuka N, Yamaji T, Uemura S and Dama I 2002 Moving mask deep X-ray lithography system with multi state for 3-D microfabrication Microsystems Technologies 8 938 [8] Ryan Turner 2002 Tapered LIGA mold insert MS Thesis ...
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