2006 Conference on Optoelectronic and Microelectronic Materials and Devices, 2006
High frequency characterizations of high-K dielectrics and advanced metal-insulator-metal (MIM) c... more High frequency characterizations of high-K dielectrics and advanced metal-insulator-metal (MIM) capacitors are presented. This work deals with the impact of process on materials permittivity and the effect of architectures and high-K materials on MIM capacitors electrical performances.
This paper presents a full characterization of the thermal parameters to improve the thermal Maso... more This paper presents a full characterization of the thermal parameters to improve the thermal Mason's model for BAW resonator design, in particular, the temperature dependence of the velocity TC(V), the elasticity TC(C33 D), the piezoelectric coefficient TC(e33) and the permittivity TC(¿33) for the AlN film. These parameters associated with the piezoelectric theory assesses the TC(e33) coefficient. To do so, the temperature piezoresponse force microscopy (PFM) technique is used to measure the temperature dependence of the (d33eff) coefficient. The thermal RF measurement is used to characterize the TC(¿33) and the ultrasonic picosecond tool with its heating system is used to characterize the TC(C33 D). Finally, the thermal Mason's model is compared with the experimental response of the BAW resonator.
ABSTRACT We report on the first peristaltic micropump with active microvalves actuated by piezoel... more ABSTRACT We report on the first peristaltic micropump with active microvalves actuated by piezoelectric thin-films. We developed an original process to combine state of the art sol-gel Pb(Zr,Ti)O3 (PZT) thin-films with a highly performing silicon micropump. The device thus takes advantage of both technologies, especially with respect to low voltage actuation and high precision. It can produce μl/min flows for 24 V actuation voltage, opening a new range of applications for low consuming pumps and autonomous microfluidic systems, especially implanted devices for drug delivery.
The dielectric behavior of Pt/SrTiO3/Pt thin films is reported in this paper. STO thin films (20 ... more The dielectric behavior of Pt/SrTiO3/Pt thin films is reported in this paper. STO thin films (20 nm and 50 nm) were deposited by ion-beam-sputtering (IBS). This study was carried out in the temperature ranging from 25degC to 150degC and for frequencies in the range 0.01 Hz-1 MHz. Results showed that the permittivity depends strongly on frequency, temperature and sample thickness.
We present a technique based on ultrafast acoustics which permits us to measure the electrical de... more We present a technique based on ultrafast acoustics which permits us to measure the electrical dependence of the elastic properties of a thin piezoelectric layer. Ultrafast acoustics offers a unique way of measuring elastic properties of thin-layer in a non-destructive way using ultrashort optical pulses. We apply this technique to a thin layer to which a dc voltage is simultaneously applied. Both the film thickness and the sound velocity are affected. The two effects can be separated by use of a semi-transparent top electrode. A demonstration is made on a thin aluminum nitride (AlN). From that the d(33) piezoelectric coefficient and the stiffness variation induced by the bias in AlN are measured.
2009 IEEE International Ultrasonics Symposium, 2009
The needs for materials in thin films characterization are increasing with the raising interest f... more The needs for materials in thin films characterization are increasing with the raising interest for Micro-Electro-Mechanical-Systems. Picosecond ultrasonics (PU), a non-contact and non-destructive technique, has been largely developed to answer the mechanical metrology requirements of thin films technology, particularly in the field of Bulk Acoustic Wave (BAW) resonators. The PU technique uses a pulsed laser source to excite and detect
ABSTRACT This paper reports new results of fabrication and characterization of piezoelectric micr... more ABSTRACT This paper reports new results of fabrication and characterization of piezoelectric micro-harvesters designed for a frequency of 200Hz and very low input accelerations. We developed a process fully CMOS compatible with AlN (Aluminum Nitride) piezoelectric harvesters. We present a device working very efficiently at very low levels of acceleration. This device allows us to harvest 0.62μW at 214 Hz for 0.17g RMS for a volume of less than 3mm 3 . Under vacuum, the power harvested is more than doubled. Compared to literature, this device presents, under vacuum, the best figure of merit.
This work presents the design, manufacturing and characterization of bulk acoustic wave coupled r... more This work presents the design, manufacturing and characterization of bulk acoustic wave coupled resonator filter (BAW CRF) for W-CDMA applications. Aluminum nitride resonators with molybdenum electrodes are acoustically coupled through a W/SiO2 multi-layered stack and insulated by a fully dielectric SiN/SiOC Bragg mirror. This configuration provides galvanic isolation between input and output making CRF suitable for single-to-balanced conversion. Measurements of
2006 Conference on Optoelectronic and Microelectronic Materials and Devices, 2006
High frequency characterizations of high-K dielectrics and advanced metal-insulator-metal (MIM) c... more High frequency characterizations of high-K dielectrics and advanced metal-insulator-metal (MIM) capacitors are presented. This work deals with the impact of process on materials permittivity and the effect of architectures and high-K materials on MIM capacitors electrical performances.
This paper presents a full characterization of the thermal parameters to improve the thermal Maso... more This paper presents a full characterization of the thermal parameters to improve the thermal Mason's model for BAW resonator design, in particular, the temperature dependence of the velocity TC(V), the elasticity TC(C33 D), the piezoelectric coefficient TC(e33) and the permittivity TC(¿33) for the AlN film. These parameters associated with the piezoelectric theory assesses the TC(e33) coefficient. To do so, the temperature piezoresponse force microscopy (PFM) technique is used to measure the temperature dependence of the (d33eff) coefficient. The thermal RF measurement is used to characterize the TC(¿33) and the ultrasonic picosecond tool with its heating system is used to characterize the TC(C33 D). Finally, the thermal Mason's model is compared with the experimental response of the BAW resonator.
ABSTRACT We report on the first peristaltic micropump with active microvalves actuated by piezoel... more ABSTRACT We report on the first peristaltic micropump with active microvalves actuated by piezoelectric thin-films. We developed an original process to combine state of the art sol-gel Pb(Zr,Ti)O3 (PZT) thin-films with a highly performing silicon micropump. The device thus takes advantage of both technologies, especially with respect to low voltage actuation and high precision. It can produce μl/min flows for 24 V actuation voltage, opening a new range of applications for low consuming pumps and autonomous microfluidic systems, especially implanted devices for drug delivery.
The dielectric behavior of Pt/SrTiO3/Pt thin films is reported in this paper. STO thin films (20 ... more The dielectric behavior of Pt/SrTiO3/Pt thin films is reported in this paper. STO thin films (20 nm and 50 nm) were deposited by ion-beam-sputtering (IBS). This study was carried out in the temperature ranging from 25degC to 150degC and for frequencies in the range 0.01 Hz-1 MHz. Results showed that the permittivity depends strongly on frequency, temperature and sample thickness.
We present a technique based on ultrafast acoustics which permits us to measure the electrical de... more We present a technique based on ultrafast acoustics which permits us to measure the electrical dependence of the elastic properties of a thin piezoelectric layer. Ultrafast acoustics offers a unique way of measuring elastic properties of thin-layer in a non-destructive way using ultrashort optical pulses. We apply this technique to a thin layer to which a dc voltage is simultaneously applied. Both the film thickness and the sound velocity are affected. The two effects can be separated by use of a semi-transparent top electrode. A demonstration is made on a thin aluminum nitride (AlN). From that the d(33) piezoelectric coefficient and the stiffness variation induced by the bias in AlN are measured.
2009 IEEE International Ultrasonics Symposium, 2009
The needs for materials in thin films characterization are increasing with the raising interest f... more The needs for materials in thin films characterization are increasing with the raising interest for Micro-Electro-Mechanical-Systems. Picosecond ultrasonics (PU), a non-contact and non-destructive technique, has been largely developed to answer the mechanical metrology requirements of thin films technology, particularly in the field of Bulk Acoustic Wave (BAW) resonators. The PU technique uses a pulsed laser source to excite and detect
ABSTRACT This paper reports new results of fabrication and characterization of piezoelectric micr... more ABSTRACT This paper reports new results of fabrication and characterization of piezoelectric micro-harvesters designed for a frequency of 200Hz and very low input accelerations. We developed a process fully CMOS compatible with AlN (Aluminum Nitride) piezoelectric harvesters. We present a device working very efficiently at very low levels of acceleration. This device allows us to harvest 0.62μW at 214 Hz for 0.17g RMS for a volume of less than 3mm 3 . Under vacuum, the power harvested is more than doubled. Compared to literature, this device presents, under vacuum, the best figure of merit.
This work presents the design, manufacturing and characterization of bulk acoustic wave coupled r... more This work presents the design, manufacturing and characterization of bulk acoustic wave coupled resonator filter (BAW CRF) for W-CDMA applications. Aluminum nitride resonators with molybdenum electrodes are acoustically coupled through a W/SiO2 multi-layered stack and insulated by a fully dielectric SiN/SiOC Bragg mirror. This configuration provides galvanic isolation between input and output making CRF suitable for single-to-balanced conversion. Measurements of
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