... Find more in SwePub. By the author/editor Hedsten, Karin, ... Ataman, Caglar Holmström, Sven ... more ... Find more in SwePub. By the author/editor Hedsten, Karin, ... Ataman, Caglar Holmström, Sven Enoksson, Peter, ... Urey, Hakan About the subject TECHNOLOGY TECHNOLOGY and Electrical engin ... TECHNOLOGY TECHNOLOGY and Electrical engin ... ...
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, 2007
A two axis microelectromechanical system (MEMS) micromirror actuator is developed for display and... more A two axis microelectromechanical system (MEMS) micromirror actuator is developed for display and imaging applications. The device operates on the principle of generated magnetostatic torque by a flux generating high-frequency electro coil and a magnetic layer deposited on the movable part. The device can supply full optical scan angles of 88deg (at 100 mA drive current) and 1.8deg for slow
IEEE/ASME Journal of Microelectromechanical Systems, 2012
A novel bending flexure spring design is presented, providing linear stiffness for large rotation... more A novel bending flexure spring design is presented, providing linear stiffness for large rotations of a suspended body. Over 98% linear motion for up to $\pm 7^{\circ}$ mechanical scan angle is achievable with the new suspension design.$\hfill$ [2011-0292]
... Find more in SwePub. By the author/editor Hedsten, Karin, ... Ataman, Caglar Holmström, Sven ... more ... Find more in SwePub. By the author/editor Hedsten, Karin, ... Ataman, Caglar Holmström, Sven Enoksson, Peter, ... Urey, Hakan About the subject TECHNOLOGY TECHNOLOGY and Electrical engin ... TECHNOLOGY TECHNOLOGY and Electrical engin ... ...
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, 2007
A two axis microelectromechanical system (MEMS) micromirror actuator is developed for display and... more A two axis microelectromechanical system (MEMS) micromirror actuator is developed for display and imaging applications. The device operates on the principle of generated magnetostatic torque by a flux generating high-frequency electro coil and a magnetic layer deposited on the movable part. The device can supply full optical scan angles of 88deg (at 100 mA drive current) and 1.8deg for slow
IEEE/ASME Journal of Microelectromechanical Systems, 2012
A novel bending flexure spring design is presented, providing linear stiffness for large rotation... more A novel bending flexure spring design is presented, providing linear stiffness for large rotations of a suspended body. Over 98% linear motion for up to $\pm 7^{\circ}$ mechanical scan angle is achievable with the new suspension design.$\hfill$ [2011-0292]
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