2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601), 2002
Reactive ion etching is proposed as an alternative to wet etching silicon to form optical alignme... more Reactive ion etching is proposed as an alternative to wet etching silicon to form optical alignment grooves for optical interconnection in silicon. The dependence of the etched groove shape as a function of RIE pressure was measured. The groove shape was measured as the degree of groove conformance to a semicircular profile. An optimal pressure of 300 mTorr was determined
ABSTRACT Polymer films with high optical transmission have been investigated for making optical d... more ABSTRACT Polymer films with high optical transmission have been investigated for making optical devices for several years. SU8 photoresist and optical adhesives have been investigated for use as thin films for optical devices, not what they were originally designed for. Optical adhesives are typically a one component thermoset polymer and are convenient to use for making thin film optical devices such as waveguides. They are prepared in minutes as thin films unlike SU8, which has to be carefully thermally cured over several hours for optimum results. However SU8 can be accurately patterned to form the geometry of structures required for single mode optical waveguides. SU8 in combination with the lower refractive index optical adhesive films such as UV15 from Master Bond are used to form single and multi mode waveguides. SU8 is photopatternable but we have also used dry etching of the SU8 layer or the other polymer layers e.g. UV15 to form the ribs, ridges or trenches required to guide single modes of light. Optical waveguides were also fabricated using only optical adhesives of different refractive indices. The resolution obtainable is poorer than with SU8 and hence multi mode waveguides are obtained. Loss measurements have been obtained for waveguides of different geometries and material combinations. The process for making polymer waveguides is demonstrated for making large multi mode waveguides and microfluidic channels by scaling the process up in size.
Photonics: Design, Technology, and Packaging, 2004
A new bulk micromachined Fabry-Perot modulator fabricated using (110) silicon is presented. The m... more A new bulk micromachined Fabry-Perot modulator fabricated using (110) silicon is presented. The modulator has been developed to reduce the alignment and packaging restrictions imposed on surface micromachined Fabry-Perot modulators. The Fabry-Perot modulator consists of two vertical micromachined cantilever mirrors. The modulator is capable of a modulation depth of 7.8dB for modulation frequencies of up to 100kHz making it suitable
The control of environmental air pollution is becoming increasingly important in our modern indus... more The control of environmental air pollution is becoming increasingly important in our modern industrialised society. This has stimulated activity in the field of chemical and biochemical solid state sensors pushing forward the development of new devices with better parameters [l]. For integrated ...
Abstract Love mode surface acoustic wave (SAW) transducers were designed and fabricated by deposi... more Abstract Love mode surface acoustic wave (SAW) transducers were designed and fabricated by depositing silicon dioxide on a ST-cut quartz crystal wafer using rf magnetron sputtering. Two different propagation directions have been investigated by aligning the SAW finger pattern along the x-axis propagation direction and the direction orthogonal to the x-axis of the ST-cut quartz crystal. The latter, in which the propagation mode is dominantly the Love mode, shows promising characteristics for use as a high frequency SAW transducer ...
2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601), 2002
Reactive ion etching is proposed as an alternative to wet etching silicon to form optical alignme... more Reactive ion etching is proposed as an alternative to wet etching silicon to form optical alignment grooves for optical interconnection in silicon. The dependence of the etched groove shape as a function of RIE pressure was measured. The groove shape was measured as the degree of groove conformance to a semicircular profile. An optimal pressure of 300 mTorr was determined
ABSTRACT Polymer films with high optical transmission have been investigated for making optical d... more ABSTRACT Polymer films with high optical transmission have been investigated for making optical devices for several years. SU8 photoresist and optical adhesives have been investigated for use as thin films for optical devices, not what they were originally designed for. Optical adhesives are typically a one component thermoset polymer and are convenient to use for making thin film optical devices such as waveguides. They are prepared in minutes as thin films unlike SU8, which has to be carefully thermally cured over several hours for optimum results. However SU8 can be accurately patterned to form the geometry of structures required for single mode optical waveguides. SU8 in combination with the lower refractive index optical adhesive films such as UV15 from Master Bond are used to form single and multi mode waveguides. SU8 is photopatternable but we have also used dry etching of the SU8 layer or the other polymer layers e.g. UV15 to form the ribs, ridges or trenches required to guide single modes of light. Optical waveguides were also fabricated using only optical adhesives of different refractive indices. The resolution obtainable is poorer than with SU8 and hence multi mode waveguides are obtained. Loss measurements have been obtained for waveguides of different geometries and material combinations. The process for making polymer waveguides is demonstrated for making large multi mode waveguides and microfluidic channels by scaling the process up in size.
Photonics: Design, Technology, and Packaging, 2004
A new bulk micromachined Fabry-Perot modulator fabricated using (110) silicon is presented. The m... more A new bulk micromachined Fabry-Perot modulator fabricated using (110) silicon is presented. The modulator has been developed to reduce the alignment and packaging restrictions imposed on surface micromachined Fabry-Perot modulators. The Fabry-Perot modulator consists of two vertical micromachined cantilever mirrors. The modulator is capable of a modulation depth of 7.8dB for modulation frequencies of up to 100kHz making it suitable
The control of environmental air pollution is becoming increasingly important in our modern indus... more The control of environmental air pollution is becoming increasingly important in our modern industrialised society. This has stimulated activity in the field of chemical and biochemical solid state sensors pushing forward the development of new devices with better parameters [l]. For integrated ...
Abstract Love mode surface acoustic wave (SAW) transducers were designed and fabricated by deposi... more Abstract Love mode surface acoustic wave (SAW) transducers were designed and fabricated by depositing silicon dioxide on a ST-cut quartz crystal wafer using rf magnetron sputtering. Two different propagation directions have been investigated by aligning the SAW finger pattern along the x-axis propagation direction and the direction orthogonal to the x-axis of the ST-cut quartz crystal. The latter, in which the propagation mode is dominantly the Love mode, shows promising characteristics for use as a high frequency SAW transducer ...
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