Bulletin of the American Physical Society, Jan 1, 2007
Recent studies for SiC [1] show that oxidation in the presence of metal impurities (especially Na... more Recent studies for SiC [1] show that oxidation in the presence of metal impurities (especially Na) introduced from an alumina environment yields enhanced thermal oxidation rate, low interface trap density, and high MOSFET channel mobility. In this work, different sodium ...
We report results on the introduction of nitrogen at the SiC/SiO2 interface using a plasma proces... more We report results on the introduction of nitrogen at the SiC/SiO2 interface using a plasma process, thus avoiding the detrimental effects of additional oxidation that accompany other standard nitridation processes, such as annealing in NO gas. The plasma process results ...
Abstract In this paper, nitridation of thermally oxidized (0001) 4H-SiC will be discussed using n... more Abstract In this paper, nitridation of thermally oxidized (0001) 4H-SiC will be discussed using nitrogen oxide and nitrogen plasma annealing. The interface trap density and channel mobility was reported as a function of interfacial nitrogen content by varying NO annealing ...
The silicon-based microelectronic industry has played an essential role in the development of mod... more The silicon-based microelectronic industry has played an essential role in the development of modern technology for the last 50 years. The major reasons that silicon is still the dominant material for most of the electronic devices are the excellent quality of its natural ...
A conjugate solution method is used where temperature and heat flux continuity are invoked at the... more A conjugate solution method is used where temperature and heat flux continuity are invoked at the interface in contrast to the discontinuous interface boundary conditions for the oil film and thepad in a thrust bearing. Three dimensional calculations are made to obtain the oil ...
This paper particularly discusses the course that Britain and Russia Partitioned Pamir in Central... more This paper particularly discusses the course that Britain and Russia Partitioned Pamir in Central Asia by the end of 19th on the basis of Chinese bources and foreign sources published lately. It makes a new examination on the standpoint of Qing government ...
Bulletin of the American Physical Society, Jan 1, 2007
Recent studies for SiC [1] show that oxidation in the presence of metal impurities (especially Na... more Recent studies for SiC [1] show that oxidation in the presence of metal impurities (especially Na) introduced from an alumina environment yields enhanced thermal oxidation rate, low interface trap density, and high MOSFET channel mobility. In this work, different sodium ...
We report results on the introduction of nitrogen at the SiC/SiO2 interface using a plasma proces... more We report results on the introduction of nitrogen at the SiC/SiO2 interface using a plasma process, thus avoiding the detrimental effects of additional oxidation that accompany other standard nitridation processes, such as annealing in NO gas. The plasma process results ...
Abstract In this paper, nitridation of thermally oxidized (0001) 4H-SiC will be discussed using n... more Abstract In this paper, nitridation of thermally oxidized (0001) 4H-SiC will be discussed using nitrogen oxide and nitrogen plasma annealing. The interface trap density and channel mobility was reported as a function of interfacial nitrogen content by varying NO annealing ...
The silicon-based microelectronic industry has played an essential role in the development of mod... more The silicon-based microelectronic industry has played an essential role in the development of modern technology for the last 50 years. The major reasons that silicon is still the dominant material for most of the electronic devices are the excellent quality of its natural ...
A conjugate solution method is used where temperature and heat flux continuity are invoked at the... more A conjugate solution method is used where temperature and heat flux continuity are invoked at the interface in contrast to the discontinuous interface boundary conditions for the oil film and thepad in a thrust bearing. Three dimensional calculations are made to obtain the oil ...
This paper particularly discusses the course that Britain and Russia Partitioned Pamir in Central... more This paper particularly discusses the course that Britain and Russia Partitioned Pamir in Central Asia by the end of 19th on the basis of Chinese bources and foreign sources published lately. It makes a new examination on the standpoint of Qing government ...
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