Abstract: This paper presents a detailed noise analysis and a noise-based optimization procedure ... more Abstract: This paper presents a detailed noise analysis and a noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take into account the noise shaping induced by damping phenomena at micro scale. The existing literature presents detailed models for the damping at microscale, but usually neglects them in the noise analysis process, assuming instead a white spectrum approximation for the mechano-thermal noise.
Abstract-This paper presents a detailed noise analysis and noise-based optimization procedure for... more Abstract-This paper presents a detailed noise analysis and noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take into account the noise shaping induced by damping phenomena at micro scale. The ...
Abstract This paper presents a detailed noise analysis and noise-based optimization procedure for... more Abstract This paper presents a detailed noise analysis and noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take into account the noise shaping induced by damping phenomena at micro scale. The extraction of a behavioral model of the solid gas interaction is obtained by matching the FEA simulations with a parametric expression for the squeeze-film damping, suggested by the analytical modeling.
Abstract: This paper presents a detailed noise analysis and a noise-based optimization procedure ... more Abstract: This paper presents a detailed noise analysis and a noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take into account the noise shaping induced by damping phenomena at micro scale. The existing literature presents detailed models for the damping at microscale, but usually neglects them in the noise analysis process, assuming instead a white spectrum approximation for the mechano-thermal noise.
Abstract-This paper presents a detailed noise analysis and noise-based optimization procedure for... more Abstract-This paper presents a detailed noise analysis and noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take into account the noise shaping induced by damping phenomena at micro scale. The ...
Abstract This paper presents a detailed noise analysis and noise-based optimization procedure for... more Abstract This paper presents a detailed noise analysis and noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take into account the noise shaping induced by damping phenomena at micro scale. The extraction of a behavioral model of the solid gas interaction is obtained by matching the FEA simulations with a parametric expression for the squeeze-film damping, suggested by the analytical modeling.
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