In this work, a theoretical analysis on the magnetic force
generation of micro-actuator driven b... more In this work, a theoretical analysis on the magnetic force
generation of micro-actuator driven by planar microcoil is
reported. The actuator design is optimized to increase the
magnetic force and flux density that is useful for mechanical
membrane deformation of an actuator. Therefore, this work is
focused on the design and simulation of actuator material and
structure using a finite element analysis method. As the results,
the obtained magnetic force of maximum 11.4 mN has been
observed for the actuator design having coil geometry of width w
= 100 μm, space s =100 μm, turn N = 20 and thickness t =20 μm
with NdFeB as magnet material. Hence, the optimized design
geometry of the coil can be used as reference for the fabrication
of electromagnetic actuator for micropump application.
On-chip micro-transformers with a stacked interwinding coil have been developed. The
transformer ... more On-chip micro-transformers with a stacked interwinding coil have been developed. The transformer is fabricated using simple and cost-effective MEMS surface micromachining. High-frequency characteristics of the transformer are analyzed by comparing its performances for various coil structures and substrate materials, respectively. The results show that the RF performance of the glass-based transformer is improved compared to that of a silicon-based transformer. An analysis of various coil configuration leads to the conclusion that the metal-to-metal capacitance has a significant influence on the RF characteristics. The process fabrication of the device is simple, highlighting good prospects for future three-dimensional RF-MEMS device application.
A single layer micro-transformer with square interwinding coil geometry has been developed. The t... more A single layer micro-transformer with square interwinding coil geometry has been developed. The transformers were fabricated on a high resistive glass substrate using MEMS surface micromachining. The fabricated micro-transformer was measured and compared with the simulation. Its characteristics are studied in wide range of operating frequency. As the results, Q-factor as high as 1.95, minimum insertion loss of -4.1 dB at 720 MHz and resonance frequency of 580 MHz were achieved which show a good prospect in various RF-ICpsilas applications.
This paper presents an analysis on the design of coupled coil. The coil platform that has been de... more This paper presents an analysis on the design of coupled coil. The coil platform that has been developed is a single layer coil structure on the planar surface of the substrate, the structure offers an integrated solution for customizable application due to its compact and small size. The design of the spiral coil has been analysed using field solver analysis ASITIC. As a demonstration of the usefulness of such analysis, a coupled coil is fabricated on a glass substrate and measured at frequency range between 50 MHz and 800 MHz. A coupling factor of about 0.7 and self inductance of 12.7 nH were achieved which show a good agreement with the simulation.
... Hybrid Microgenerator Cell Azrul Azlan Hamzah, Khairul Nisha Mohd. ... REFERENCES [1] B. Tian... more ... Hybrid Microgenerator Cell Azrul Azlan Hamzah, Khairul Nisha Mohd. ... REFERENCES [1] B. Tian, X. Zheng, TJ Kempa, Y. Fang, N. Yu, G. Yu, J. Huang, and CM Lieber, "Coaxial silicon nanowires as solar cells and nanoelectronic power sources," Nature, vol. 449, pp. ...
This paper presents a comparison of thin film materials used as movable membrane for thermal actu... more This paper presents a comparison of thin film materials used as movable membrane for thermal actuated micropump. The materials discussed are PMMA, polyimide, silicon nitride (Si3N4) and single crystal silicon. The properties of membrane material are characterized using Finite Element Analysis (FEA) to study its mechanical and physical behavior that are suitable to be used as an actuator for thermal
Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems, 2009
On-chip micro-transformer on high resistive glass substrate has been developed. The transformer c... more On-chip micro-transformer on high resistive glass substrate has been developed. The transformer consists of stacked spiral coil with square interwinding coil structure which is fabricated using surface micromachining technique. The performance of the micro-transformer is illustrated through low and high frequency measurements. The characteristics of glass based transformer are compared with conventional Si-based micro-transformer. The results show that the RF performance of the glass-based transformer is improved compared to that of silicon-based transformer. The process fabrication of the device is simple, highlighting a good prospect for the future three-dimensional RF-MEMS device application.
This paper presents a study of the silicon based planar inductor for high frequency transformer. ... more This paper presents a study of the silicon based planar inductor for high frequency transformer. The purpose of the study is to investigate the role of the coreless inductor design to increase the performance of the planar transformer. Topics such as design technique of spiral inductor and surface micromachining process technique have been also described in this paper.
Journal of Micromechanics and Microengineering, 2008
On-chip micro-transformers with a stacked interwinding coil have been developed. The transformer ... more On-chip micro-transformers with a stacked interwinding coil have been developed. The transformer is fabricated using simple and cost-effective MEMS surface micromachining. High-frequency characteristics of the transformer are analyzed by comparing its performances for various coil structures and substrate materials, respectively. The results show that the RF performance of the glass-based transformer is improved compared to that of a silicon-based transformer. An analysis of various coil configuration leads to the conclusion that the metal-to-metal capacitance has a significant influence on the RF characteristics. The process fabrication of the device is simple, highlighting good prospects for future three-dimensional RF-MEMS device application.
Many biological fluids require filtration during its processing, either to separate the various c... more Many biological fluids require filtration during its processing, either to separate the various components in the fluid or to remove unwanted or harmful contaminants from the medium. Challenges arise in the filtration process as the masses to be filtered appear in various sizes. Conventional filtration method requires lengthy and timely repeated processes. A simple solution to this problem is the
In this work, a theoretical analysis on the magnetic force
generation of micro-actuator driven b... more In this work, a theoretical analysis on the magnetic force
generation of micro-actuator driven by planar microcoil is
reported. The actuator design is optimized to increase the
magnetic force and flux density that is useful for mechanical
membrane deformation of an actuator. Therefore, this work is
focused on the design and simulation of actuator material and
structure using a finite element analysis method. As the results,
the obtained magnetic force of maximum 11.4 mN has been
observed for the actuator design having coil geometry of width w
= 100 μm, space s =100 μm, turn N = 20 and thickness t =20 μm
with NdFeB as magnet material. Hence, the optimized design
geometry of the coil can be used as reference for the fabrication
of electromagnetic actuator for micropump application.
On-chip micro-transformers with a stacked interwinding coil have been developed. The
transformer ... more On-chip micro-transformers with a stacked interwinding coil have been developed. The transformer is fabricated using simple and cost-effective MEMS surface micromachining. High-frequency characteristics of the transformer are analyzed by comparing its performances for various coil structures and substrate materials, respectively. The results show that the RF performance of the glass-based transformer is improved compared to that of a silicon-based transformer. An analysis of various coil configuration leads to the conclusion that the metal-to-metal capacitance has a significant influence on the RF characteristics. The process fabrication of the device is simple, highlighting good prospects for future three-dimensional RF-MEMS device application.
A single layer micro-transformer with square interwinding coil geometry has been developed. The t... more A single layer micro-transformer with square interwinding coil geometry has been developed. The transformers were fabricated on a high resistive glass substrate using MEMS surface micromachining. The fabricated micro-transformer was measured and compared with the simulation. Its characteristics are studied in wide range of operating frequency. As the results, Q-factor as high as 1.95, minimum insertion loss of -4.1 dB at 720 MHz and resonance frequency of 580 MHz were achieved which show a good prospect in various RF-ICpsilas applications.
This paper presents an analysis on the design of coupled coil. The coil platform that has been de... more This paper presents an analysis on the design of coupled coil. The coil platform that has been developed is a single layer coil structure on the planar surface of the substrate, the structure offers an integrated solution for customizable application due to its compact and small size. The design of the spiral coil has been analysed using field solver analysis ASITIC. As a demonstration of the usefulness of such analysis, a coupled coil is fabricated on a glass substrate and measured at frequency range between 50 MHz and 800 MHz. A coupling factor of about 0.7 and self inductance of 12.7 nH were achieved which show a good agreement with the simulation.
... Hybrid Microgenerator Cell Azrul Azlan Hamzah, Khairul Nisha Mohd. ... REFERENCES [1] B. Tian... more ... Hybrid Microgenerator Cell Azrul Azlan Hamzah, Khairul Nisha Mohd. ... REFERENCES [1] B. Tian, X. Zheng, TJ Kempa, Y. Fang, N. Yu, G. Yu, J. Huang, and CM Lieber, "Coaxial silicon nanowires as solar cells and nanoelectronic power sources," Nature, vol. 449, pp. ...
This paper presents a comparison of thin film materials used as movable membrane for thermal actu... more This paper presents a comparison of thin film materials used as movable membrane for thermal actuated micropump. The materials discussed are PMMA, polyimide, silicon nitride (Si3N4) and single crystal silicon. The properties of membrane material are characterized using Finite Element Analysis (FEA) to study its mechanical and physical behavior that are suitable to be used as an actuator for thermal
Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems, 2009
On-chip micro-transformer on high resistive glass substrate has been developed. The transformer c... more On-chip micro-transformer on high resistive glass substrate has been developed. The transformer consists of stacked spiral coil with square interwinding coil structure which is fabricated using surface micromachining technique. The performance of the micro-transformer is illustrated through low and high frequency measurements. The characteristics of glass based transformer are compared with conventional Si-based micro-transformer. The results show that the RF performance of the glass-based transformer is improved compared to that of silicon-based transformer. The process fabrication of the device is simple, highlighting a good prospect for the future three-dimensional RF-MEMS device application.
This paper presents a study of the silicon based planar inductor for high frequency transformer. ... more This paper presents a study of the silicon based planar inductor for high frequency transformer. The purpose of the study is to investigate the role of the coreless inductor design to increase the performance of the planar transformer. Topics such as design technique of spiral inductor and surface micromachining process technique have been also described in this paper.
Journal of Micromechanics and Microengineering, 2008
On-chip micro-transformers with a stacked interwinding coil have been developed. The transformer ... more On-chip micro-transformers with a stacked interwinding coil have been developed. The transformer is fabricated using simple and cost-effective MEMS surface micromachining. High-frequency characteristics of the transformer are analyzed by comparing its performances for various coil structures and substrate materials, respectively. The results show that the RF performance of the glass-based transformer is improved compared to that of a silicon-based transformer. An analysis of various coil configuration leads to the conclusion that the metal-to-metal capacitance has a significant influence on the RF characteristics. The process fabrication of the device is simple, highlighting good prospects for future three-dimensional RF-MEMS device application.
Many biological fluids require filtration during its processing, either to separate the various c... more Many biological fluids require filtration during its processing, either to separate the various components in the fluid or to remove unwanted or harmful contaminants from the medium. Challenges arise in the filtration process as the masses to be filtered appear in various sizes. Conventional filtration method requires lengthy and timely repeated processes. A simple solution to this problem is the
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Papers by Jumril Yunas
generation of micro-actuator driven by planar microcoil is
reported. The actuator design is optimized to increase the
magnetic force and flux density that is useful for mechanical
membrane deformation of an actuator. Therefore, this work is
focused on the design and simulation of actuator material and
structure using a finite element analysis method. As the results,
the obtained magnetic force of maximum 11.4 mN has been
observed for the actuator design having coil geometry of width w
= 100 μm, space s =100 μm, turn N = 20 and thickness t =20 μm
with NdFeB as magnet material. Hence, the optimized design
geometry of the coil can be used as reference for the fabrication
of electromagnetic actuator for micropump application.
transformer is fabricated using simple and cost-effective MEMS surface micromachining.
High-frequency characteristics of the transformer are analyzed by comparing its performances
for various coil structures and substrate materials, respectively. The results show that the RF
performance of the glass-based transformer is improved compared to that of a silicon-based
transformer. An analysis of various coil configuration leads to the conclusion that the metal-to-metal capacitance has a significant influence on the RF characteristics. The process fabrication of the device is simple, highlighting good prospects for future three-dimensional RF-MEMS device application.
generation of micro-actuator driven by planar microcoil is
reported. The actuator design is optimized to increase the
magnetic force and flux density that is useful for mechanical
membrane deformation of an actuator. Therefore, this work is
focused on the design and simulation of actuator material and
structure using a finite element analysis method. As the results,
the obtained magnetic force of maximum 11.4 mN has been
observed for the actuator design having coil geometry of width w
= 100 μm, space s =100 μm, turn N = 20 and thickness t =20 μm
with NdFeB as magnet material. Hence, the optimized design
geometry of the coil can be used as reference for the fabrication
of electromagnetic actuator for micropump application.
transformer is fabricated using simple and cost-effective MEMS surface micromachining.
High-frequency characteristics of the transformer are analyzed by comparing its performances
for various coil structures and substrate materials, respectively. The results show that the RF
performance of the glass-based transformer is improved compared to that of a silicon-based
transformer. An analysis of various coil configuration leads to the conclusion that the metal-to-metal capacitance has a significant influence on the RF characteristics. The process fabrication of the device is simple, highlighting good prospects for future three-dimensional RF-MEMS device application.