In this study we present gas-phase fluorination as a method to create a thin LiF layer on Li6.5La3Zr1.5Ta0.5O12 (LLZTO). We compare these fluorinated films with LiF films produced by RF-magnetron sputtering, where we investigated the interface between the LLZTO and the deposited LiF showing no formation of a reaction layer. Furthermore, we investigate the ability of this LiF layer as a protection layer against Li2CO3 formation in ambient air. By this we show that Li2CO3 formation is absent at the LLZTO surface after 24 h in ambient air supporting the protective character of the formed LiF films and hence could enhance the handling of LLZTO in air for battery production. With respect to the use within hybrid electrolytes consisting of LLZTO and a mixture of polyethylene oxide (PEO) and Lithium bis(trifluoromethanesulfonyl)imide (LiTFSI) we also investigated the interface between the formed LiF films and a mixture of PEO LiTFSI by X-ray photoelectron spectroscopy (XPS) showing decomposition of the LiTFSI at the interface.