extreme ultraviolet
Recently Published Documents

The combination of advanced high-power laser technology, new acceleration methods and achievements in undulator development offers the opportunity to build compact, high-brilliance free electron lasers driven by a laser wakefield accelerator. Here, we present a simulation study outlining the main requirements for the laser–plasma-based extreme ultraviolet free electron laser setup with the aim to reach saturation of the photon pulse energy in a single unit of a commercially available undulator with the deflection parameter K0 in the range of 1–1.5. A dedicated electron beam transport strategy that allows control of the electron beam slice parameters, including collective effects, required by the self-amplified spontaneous emission regime is proposed. Finally, a set of coherent photon radiation parameters achievable in the undulator section utilizing the best experimentally demonstrated electron beam parameters are analyzed. As a result, we demonstrate that the ultra-short, few-fs-level pulse of the photon radiation with the wavelength in the extreme ultraviolet range can be obtained with the peak brilliance of ∼7×1028 photons/pulse/mm2/mrad2/0.1%bw.

Abstract Metal oxide nanocluster resists have recently attracted considerable attention for use in extreme ultraviolet (EUV) lithography. To obtain sophisticated guidelines for material design, it is necessary to understand well the radiation-induced chemical reaction scheme including the insolubilization mechanism. In this study, the production of CO2, which is considered to be one of the end products of treatment with an ionizing radiation, was investigated for eight types of carboxylic acid under various conditions using -rays (60Co) as a radiation source. The amount of CO2 produced was measured by gas chromatography (GC). GCO2 (/100 eV), which indicates decarboxylation efficiency, was evaluated. CO2 was generated through electron addition, hole transfer, and hydroxyl radical addition to the molecular and ionic forms of carboxylic acids. The dependences of GCO2 on reaction partners were clarified. The dependences of GCO2 on the molecular structure and dissociative state of carboxylic acids were also clarified.

Abstract With the purpose of designing the extreme ultraviolet polarizer with many objectives, a combined application of multiobjective genetic algorithms is theoretically proposed. Owing to the multiobjective genetic algorithm, the relationships between different designing objectives of extreme ultraviolet polarizer have been obtained by analyzing the distribution of nondominated solutions in the 4D objective space, and the optimized multilayer design can be obtained by guiding the searching in the desired region based on the multiobjective genetic algorithm with reference direction. Comparing with the conventional method of multilayer design, our method has a higher probability of achieving the optimal multilayer design. Our work should be the first research in optimizing the optical multilayer designs in the high-dimensional objective space, and our results demonstrate a potential application of our method in the designs of optical thin films.

Impulsive solar energetic particle (ISEP) events show peculiar elemental composition, with enhanced 3He and heavy-ion abundances, markedly different from our Solar System composition. Furthermore, the events are characterized by a wide variety of energy spectral shapes from power laws to rounded spectra toward the low energies. Solar sources of the events have been firmly associated with coronal jets. Surprisingly, new observations have shown that events are often accompanied by so-called extreme-ultraviolet (EUV) coronal waves–a large-scale phenomenon compared to jets. This paper outlines the current understanding of the linkage of EUV waves with jets and energetic ions in ISEP events.

Abstract High-NA extreme ultraviolet (EUV) lithography is currently in development. Fabrication of exposure tools and optics with a numerical aperture (NA) equal to 0.55 has started at ASML and Carl Zeiss. Lenses with such high NA will have very small depths-of-focus, which will require improved focus systems and significant improvements in wafer flatness during processing. Lenses are anamorphic to address mask 3D issues, which results in wafer field sizes of 26 mm × 16.5 mm, half that of lower NA EUV tools and optical scanners. Production of large die will require stitching. Computational infrastructure is being created to support high-NA lithography, including simulators that use Tatian polynomials to characterize the aberrations of lenses with central obscurations. High resolution resists that meet the line-edge roughness (LER) and defect requirements for high-volume manufacturing (HVM) also need to be developed. High power light sources will also be needed to limit photon shot noise.

Abstract Solar extreme ultraviolet (EUV) waves are spectacular propagating disturbances with EUV enhancements in annular shapes in the solar corona. These EUV waves carry critical information about the coronal magnetised plasma that can shed light on gaining insight to the elusive physical parameters (e.g. the magnetic field strength) by global solar coronal magneto-seismology (SMS). EUV waves are closely associated with a wide range of solar atmospheric eruptions, from violent flares and coronal mass ejections (CMEs) to less energetic plasma jets or mini-filament eruptions, and can play a role in accelerating particles to non-thermal energies. However, the physical nature and driving mechanism of EUV waves is still under controversy. Here, we report the unique discovery of twin EUV waves (TEWs) that were formed in a single eruption with observations from two different perspectives. In all earlier studies, a single eruption was associated at most in a single EUV wave. The newly found TEWs urge to re-visit our theoretical understanding about the underlying formation mechanism(s) of coronal EUV waves. Two distinct scenarios of TEWs were found. In the first scenario, the two waves were separately associated with a filament eruption and a precursor jet, while in another scenario the two waves were successively associated with a filament eruption. Hence, we label these distinguished scenarios as "fraternal TEWs" and "identical TEWs", respectively. Further, we also suggest that impulsive lateral expansions of two distinct groups of coronal loops are critical to the formation of TEWs in a single eruption.

Abstract The ultraviolet (UV)-induced dissociation and photofragmentation of gas-phase CH2BrI molecules induced by intense femtosecond extreme ultraviolet (XUV) pulses at three different photon energies are studied by multi-mass ion imaging. Using a UV-pump — XUV-probe scheme, charge transfer between highly charged iodine ions and neutral CH2Br radicals produced by C—I bond cleavage is investigated. In earlier charge-transfer studies, the center of mass of the molecules was located along the axis of the bond cleaved by the pump pulse. In the present case of CH2BrI, this is not the case, thus inducing a rotation of the fragment. We discuss the influence of the rotation on the charge transfer process using a classical over-the-barrier model. Our modeling suggests that, despite the fact that the dissociation is slower due to the rotational excitation, the critical interatomic distance for charge transfer is reached faster. Furthermore, we suggest that charge transfer during molecular fragmentation may be modulated in a complex way.

Abstract Here, we study the temperature structure of flaring and non-flaring coronal loops, using extracted loops from images taken in six extreme ultraviolet (EUV) channels recorded by Atmospheric Imaging Assembly (AIA)/ Solar Dynamic Observatory (SDO). We use data for loops of X2.1-class-flaring active region (AR11283) during 22:10UT till 23:00UT, on 2011, September 6; and non-flaring active region (AR12194) during 08:00:00UT till 09:00:00UT on 2014, October 26. By using spatially-synthesized Gaussian DEM forward-fitting method, we calculate the peak temperatures for each strip of the loops. We apply the Lomb-Scargle method to compute the oscillations periods for the temperature series of each strip. The periods of the temperature oscillations for the flaring loops are ranged from 7 min to 28.4 min. These temperature oscillations show very close behavior to the slow-mode oscillation. We observe that the temperature oscillations in the flaring loops are started at least around 10 minutes before the transverse oscillations and continue for a long time duration even after the transverse oscillations are ended. The temperature amplitudes are increased at the flaring time (during 20 min) in the flaring loops. The periods of the temperatures obtained for the non-flaring loops are ranged from 8.5 min to 30 min,but their significances are less (below 0.5) in comparison with the flaring ones (near to one). Hence the detected temperature periods for the non-flaring loops' strips are less probable in comparison with the flaring ones, and maybe they are just fluctuations. Based on our confined observations, it seems that the flaring loops' periods show more diversity and their temperatures have wider ranges of variation than the non-flaring ones. More accurate commentary in this respect requires more extensive statistical research and broader observations.