mems sensors
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The paper discusses the improvement of the accuracy of an inertial navigation system created on the basis of MEMS sensors using machine learning (ML) methods. As input data for the classifier, we used information obtained from a developed laboratory setup with MEMS sensors on a sealed platform with the ability to adjust its tilt angles. To assess the effectiveness of the models, test curves were constructed with different values of the parameters of these models for each core in the case of a linear, polynomial radial basis function. The inverse regularization parameter was used as a parameter. The proposed algo-rithm based on MO has demonstrated its ability to correctly classify in the presence of noise typical for MEMS sensors, where good classification results were obtained when choosing the optimal values of hy-perparameters.

Abstract The results of a study of the anodic bonding parameters of transparent glass-ceramics based on lithium aluminosilicates which are promising as structural materials of MEMS and MOEMS sensors are presented. A comparison of the optical transmittance of these materials and classical for MEMS industry glasses has been carried out. The glass-ceramics electrical conductivity in a wide temperature range has been measured. The procedure of hermetic sealing of glass-ceramics by the anodic bonding at temperatures of 150 – 250 °C has been worked out. A prototype of glass-ceramic atomic cell has been fabricated.

Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to environmental influences. It is fortunate that the integration of dual or multiple resonators into a sensor has become an effective way to solve such issues. Studies have shown that dual-resonator-based (DRB) and multiple-resonator-based (MRB) MEMS sensors have the ability to reject environmental influences, and their sensitivity is tens or hundreds of times that of SRB sensors. Hence, it is worth understanding the state-of-the-art technology behind DRB and MRB MEMS sensors to promote their application in future high-end markets.