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    Cleanroom Design Summary

    Uploaded by

    K'hng Beng Hooi
    This document outlines cleanroom class limits according to ISO and Federal Standard 209E standards. It defines the maximum particle counts allowed per cubic meter or foot for different cleanroom classes ranging from class 1 to class 8. It then provides details on filtration, air changes, and other requirements needed to achieve different cleanroom classes from 1 to 100,000. Maintaining proper filter coverage is important as the coverage needed reduces from operational to at rest modes for a given cleanroom class.

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    Attribution Non-Commercial (BY-NC)
    Download as PDF, TXT or read online from Scribd

    Cleanroom Design Summary

    Uploaded by

    K'hng Beng Hooi
    43 views2 pages
    This document outlines cleanroom class limits according to ISO and Federal Standard 209E standards. It defines the maximum particle counts allowed per cubic meter or foot for different cleanroom classes ranging from class 1 to class 8. It then provides details on filtration, air changes, and other requirements needed to achieve different cleanroom classes from 1 to 100,000. Maintaining proper filter coverage is important as the coverage needed reduces from operational to at rest modes for a given cleanroom class.

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    Cleanroom Design Summary

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    This document outlines cleanroom class limits according to ISO and Federal Standard 209E standards. It defines the maximum particle counts allowed per cubic meter or foot for different cleanroom classes ranging from class 1 to class 8. It then provides details on filtration, air changes, and other requirements needed to achieve different cleanroom classes from 1 to 100,000. Maintaining proper filter coverage is important as the coverage needed reduces from operational to at rest modes for a given cleanroom class.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    43 views2 pages

    Cleanroom Design Summary

    Uploaded by

    K'hng Beng Hooi
    This document outlines cleanroom class limits according to ISO and Federal Standard 209E standards. It defines the maximum particle counts allowed per cubic meter or foot for different cleanroom classes ranging from class 1 to class 8. It then provides details on filtration, air changes, and other requirements needed to achieve different cleanroom classes from 1 to 100,000. Maintaining proper filter coverage is important as the coverage needed reduces from operational to at rest modes for a given cleanroom class.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    of 2

    Cleanroom Class Limits and Certification

    Page 1 of 2

    Cleanroom Class Limits

    Class limits (maximum allowable particles)


    ISO
    CLASS
    CLASS
    CLASS
    CLASS
    CLASS
    CLASS

    3
    4
    5
    6
    7
    8

    FED STD 209E

    0.1 m

    0.3 m

    0.5 m

    1,000 / 35

    102 / 3

    35 / 1

    5.0 m

    10

    10,000 / 350

    1,020 / 30

    352 / 10

    100

    100,000 / 3,500

    10,200 / 300

    3,520 / 100

    1,000

    1,000,000 / 35,000

    102,000 / N/A

    35,200 / 1,000

    10,000

    350,000

    N/A

    352,000 / 10,000

    70

    1000,000

    3,500,000

    N/A

    3,520,000 / 100,000

    700

    ISO 14644-1 (per cubic meter)


    Fed Std. 209 E USA (per cubic foot)
    ISO standard requires results to be shown in cubic meters (1 cubic meter = 35.314 cubic feet)

    Cleanroom Class 1

    540 to 600+ air changes per hour (98%+ ceiling coverage)


    ULPA filters (99.9995% on .12 microns)
    Gel/Flush grid ceiling systems with raised floors are required
    Outside/makeup air to be prefiltered with a HEPA filter

    Cleanroom Class 10

    540 to 600 air changes per hour (85-90% ceiling coverage)


    99.999% on 0.3 microns, with a raised floors
    90%+ coverage with low wall returns
    Gasketed grids with negative plenums acceptable
    HEPA filters on makeup air

    Cleanroom Class 100


    400 to 480 air changes per hour (60-80% ceiling coverage)
    99.99% HEPA filters
    Raised floor assures optimal performance. Low wall returns work when they are no further than 12' from the
    center of the room
    Gasketed ceiling grid

    Cleanroom Class 1,000

    120 to 150 air changes per hour (40-50% ceiling coverage)


    99.99% HEPA filter
    Gasketed ceiling grid
    Raised floor delivers best performance, but low wall returns are very common

    Cleanroom Class 10,000


    45 to 60 air changes per hour (10-20% ceiling coverage)
    99.97% or 99.99% HEPAs
    Low wall or ceiling returns acceptable in most applications

    http://www.modularcleanrooms.com/class.html

    06/09/2013

    Cleanroom Class Limits and Certification

    Page 2 of 2

    Cleanroom Class 100,000


    20 to 30 air changes per hour (5% ceiling coverage)
    HEPA filters or 95% HEPAs (95%+ ASHRAE box filters) located downstream of the HVAC unit
    Heat load may require more air changes
    1. Room layout with equipment must be evaluated to look for return air paths and possible cross contamination.
    2. 95% ASHRAE filters when new may only be 70% and could affect the particle level.

    Important point to consider concerning filter coverage


    A 300 sq. ft. cleanroom may need 90% coverage (38 HEPAs) for Class 100 at the "operational" mode, 60%
    coverage (23) in the "at rest" mode, and only 40% (15) to meet Class 100 at "as built". The same rules can
    and do apply to Class 1,000 and Class 10,000 levels.

    Modular Cleanrooms Inc.


    3740 Paris Street
    Denver, Colorado 80239

    1-800-496-7666 Toll Free U.S.A.


    1-303-371-0272 International Calls
    1-303-371-0270 Fax

    Tap-To-Call Toll Free U.S.A. (tel:+18004967666)

    Tap-To-Call International (tel:+13033710272)

    ModularCleanrooms.com (http://www.modularcleanrooms.com)
    sales@modularcleanrooms.com (mailto:sales@modularcleanrooms.com)
    Web Development by eNetResults Inc. (http://www.enetresults.com)

    http://www.modularcleanrooms.com/class.html

    06/09/2013

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