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Order No: Column K Column O Column I Linear (Column I)

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Actuator - 200mm width

Upper - 10mm
Lower - 15.4mm
3 layers of kapton™ on polystyrene located in the middle of the scales plate, actuator pointing upwards.
breakdown voltage - 11.8[V]

100% DC
11.8 [V] 25 [V]
W "0" W "0"
45 -12 180 -6
40 -20 175 -15
42 15 170 -15

note: the glue between the layers of kapton gets burned as time goes by. This effects the dielectric constant

Not-100% measurements in chronological order:

duty cycles
mod. Freq [hz] 100-before 25 50 75 100-after "0"-after
50 175 35 84 132 169 -20
100 169 35 85 132 160 -27
200 160 20 74 122 148 -35
400 148 0 50 125 155 -30
25 155 10 55 105 140 -30
40 140 10 55 100 135 -35
10 135 44 81 122 162 -15
500 162 21 68 145 180 0 <= 25.1[V]

250

200
f(x) = − 4.05357142857142 x + 198.053571428571
arb body force

150

100
Column K
Column O
Column I
50 Linear (Column I)

0
0 1 2 3 4 5 6 7 8 9
Order no
Column I
50 Linear (Column I)

0
0 1 2 3 4 5 6 7 8 9
Order no
pointing upwards.

ffects the dielectric constant

duty cycles Corrected


100 mean Order no 100-before 25 50 75 100-after 100%
192 1 195 55 104 152 189 189
191.5 2 196 63.0134 114.0268 162.0402 187 187
189 3 195 57.0268 113.0536 163.0804 183 183
181.5 4 178 33.0402 86.0804 164.1206 185 185
177.5 5 185 44.0536 93.1072 147.1608 170 170
172.5 6 175 50.067 100.134 150.201 170 170
163.5 7 150 65.0804 108.1608 155.2412 177 177
171 8 162 28.0938 82.1876 166.2814 180 180

200

180

160

140
50 25
arb body force

120
75 100%
100

80

60

40

20

0
8 9 0 100 200 300 400 500 600
frequency (Hz)
40

20

0
8 9 0 100 200 300 400 500 600
frequency (Hz)
Bias eliminated
Correction duty cycles
Factor 25 50 75 100
0 0.291005 0.550265 0.804233 1
4.0536 0.33697 0.609769 0.866525 1
8.1072 0.311622 0.617779 0.89115 1
12.1608 0.178596 0.465299 0.887138 1
16.2144 0.259139 0.547689 0.865652 1
20.268 0.294512 0.589024 0.883535 1
24.3216 0.367686 0.611078 0.877069 1
28.3752 0.156077 0.456598 0.923786 1

1.2

0.8
50 25
arb body force

75 100%
0.6

0.4

0.2

500 600
0
0 100 200 300 400 5
frequency (Hz)
0.2

500 600
0
0 100 200 300 400 5
frequency (Hz)
25
Polynomial (25)
50
Polynomial (50)
75
Polynomial (75)
100

400 500 600


(Hz)
400 500 600
(Hz)

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