05 Edge Welded Bellows
05 Edge Welded Bellows
05 Edge Welded Bellows
Contents
Introduction
Page 5-3
Page 5-3
Page 5-4
Page 5-4
Page 5-4
Introduction
Special Edge Welded Bellows, Standard Type
Special Edge Welded Bellows, Wide Type
Special Edge Welded Bellows, Small Type
Standard End Fittings
5-2
Page
Page
Page
Page
Page
5-5 to 5-6
5-7 to 5-8
5-9
5-10 to 5-11
5-12
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Introduction
Edge welded bellows are flexible connecting elements between vacuum flanges
or arbitrary end fittings. They counterbalance differences in height or angular offsets
and serve as vibration dampers or lifting elements. Furthermore, they are used
in linear feedthroughs, as valve seals, in handling systems and in process
automation.
Edge welded bellows consist of a number (depending on the application) of
moulded thin metal plates (diaphragms) which are welded together alternately at
their inner and outer diameter. Two of these at the inner diameter welded bellows
form a convolution.
In comparison to flexible hoses, which are made of a thin-walled, partly straight
bead welded and hydroformed tube, edge welded bellows can execute
significantly larger lateral, axial and angular motions in relation to their size and
have a lower spring rate.
Flexible hose
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5-3
5
Technical data
Bellows material
KF flange material
CF flange material
Number of cycles
Pressure difference
Operating temperature
Bakeout temperature
Options
Convolutions
Lmin
(base)
Free
length
Lmax
(base)
Base
stroke
31.5
32
38
42
10
10
3.6
26
46
31
39
41
10
10
2.5
39
59
33
43
45
10
10
2.2
Order code
Flange
KF16EWB-X
DN16KF
16
KF25EWB-X
DN25KF
KF40EWB-X
DN40KF
ISO63EWB-X
DN63ISO
75 100
73
81
85
10
10
2.4
83
92
95
10
10
94
102
106
10
10
2.3
EWB16R-X
DN16CF
16
31.5
44
54
10
10
3.6
EWB40R-X
DN40CF
39
59
63
75
10
10
2.2
65
EWB63R-X
DN63CF
90
73
85
10
10
2.7
EWB100R-X
DN100CF
102 132
83
95
10
10
2.0
EWB160R-X
DN160CF
150 185
94
106
10
10
2.3
Please specify the required stroke in millimetres in the order code instead of the "X". ( e. g.: X = 40 means 40 mm stroke)
Attention: The bellows data and sizes are subject to re-engineering and therefore can not be assured. Please ask for the active data.
5-4
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Materials
Materials
Temperature range
Corrosion resistance
Applications/Comments
-250 to +425 C
Stainless steel
316L
-250 to +425 C
Good resistance to
hydrogen flouride, seawater
-250 to +425 C
Stainless steel
347L
-73 to +425 C
AM 350
(SCT 850)
-73 to +425 C
Hastelloy
-250 to +540 C
Inconel 625
-250 to +815 C
Inconel 718
-250 to +700 C
+20 to +425 C
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5-5
5
Edge welded bellows for floating-ring seals
Valve drives
Linear motion feedthroughs
Handling systems inside vacuum
Components in process automisation
Please ask for the special catalogue Replacement Edge Welded Bellows for the
Semiconductor Industry: www.vacom-vacuum.com.
5-6
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Material
Pressure difference
Number of stress cycles
Operating temperature
Bakeout temperature
Options
DN250
DN320
0.55
0.60
0.80
0.85
0.86
1.18
1.60
1.83
1.75
2.20
1.90
2.19
1.60
2.50
2.75
2.50
2.70
2.50
2.80
2.60
2.11
2.87
2.91
2.96
3.40
3.10
2.90
3.30
3.30
3.50
3.80
0.25
0.40
0.60
0.60
0.86
1.21
1.70
1.80
1.90
1.90
1.95
2.00
1.50
2.30
2.40
2.80
2.70
2.65
2.90
2.86
2.53
2.80
3.10
3.20
3.40
3.00
3.40
3.40
3.20
3.70
3.80
Extended length
per convolution
0.35
0.35
0.40
0.40
0.34
0.43
0.45
0.48
0.40
0.50
0.50
0.44
0.50
0.50
0.50
0.51
0.70
0.75
0.60
0.74
0.66
0.65
0.51
0.75
0.75
0.75
0.75
0.75
0.80
0.75
0.80
0.60
0.75
1.00
1.00
1.20
1.64
2.15
2.28
2.30
2.40
2.45
2.44
2.00
2.80
2.90
3.31
3.40
3.40
3.50
3.60
3.19
3.45
3.61
3.95
4.15
3.75
4.15
4.15
4.00
4.45
4.60
Smallest
bending radius ()
DN200
0.08
0.08
0.10
0.10
0.10
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.15
0.15
0.15
0.15
0.15
0.15
0.15
0.15
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
Largest
bending angle
per convolution
()
DN160
13
16
20
20
26
31.5
37
41
46
51
56
59
62.5
71
76
88
90
95
100
107
108
120
132
157
185
195
215
235
285
310
360
DN100
6
8
9
10
13
16
19
21
26
31
36
39
46
46
51
60
65
70.5
75
77
83.5
90
102
127
150
162.5
180
200
250
270
320
Effective area
of differential
pressure (cm)
DN63
Operating stroke
per convolution
DN50
Free length
per convoltion
DN40
Compressed
length per
convolution
DN25
Standard
wall thickness
of ddiaphragm
DN16
Outer diameter
DN10
Inner diameter
Nominal diameter
0.74
1.17
1.7
1.83
3.10
4.59
6.37
7.81
10.4
13.5
16.9
19.1
23.3
27.3
32.1
43.5
47.6
54.2
60.5
67.1
72.4
87.2
108
159
221
252
307
372
563
662
909
130
80
87
79
88
50
91
54
62
39
33
41
90
44
38
65
72
81
69
50
77
55
60
130
112
144
124
120
180
140
145
1.10
1.43
1.72
1.72
1.90
2.20
2.63
2.52
2.37
2.13
2.00
1.94
1.38
1.86
1.81
1.82
1.72
1.60
1.66
1.53
1.34
1.34
1.35
1.17
1.05
0.88
0.91
0.83
0.64
0.68
0.60
24.7
22.0
23.3
23.3
23.3
26.9
28.3
31.4
32.7
38.9
42.4
42.5
52.1
50.9
53.8
60.0
68.3
74.7
70.7
81.2
82.2
87.9
88
115
133
146
155
169
214
218
256
Attention: The bellows data and sizes are subject to re-engineering and therefore cannot be assured. Please ask for the active data.
Other sizes, materials and specifications on request.
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5-7
DN200
DN250
DN320
0.50
0.50
1.30
1.00
1.70
1.72
2.30
2.50
2.90
3.10
3.20
3.30
1.90
4.00
3.18
3.70
3.80
3.20
4.10
4.27
3.74
3.85
4.20
4.40
4.00
4.40
4.40
4.40
4.60
4.80
Extended length
per convolution
0.75
0.90
1.05
1.00
1.45
1.52
1.90
2.24
2.10
2.40
2.40
2.55
2.10
2.90
2.95
2.80
2.72
2.70
2.60
3.05
3.30
2.81
3.40
3.60
3.30
3.85
3.80
3.80
3.50
4.20
0.90
0.95
1.70
1.30
2.10
2.06
2.70
2.90
3.40
3.60
3.70
3.80
2.40
4.55
3.78
4.30
4.65
4.00
4.70
5.00
4.50
4.55
4.95
5.15
4.70
5.10
5.10
5.10
5.40
5.60
Smallest
bending radius ()
DN160
0.40
0.40
0.40
0.30
0.40
0.50
0.40
0.40
0.50
0.50
0.50
0.50
0.50
0.55
0.60
0.60
0.75
0.80
0.60
0.73
0.76
0.70
0.75
0.75
0.70
0.70
0.70
0.70
0.80
0.80
Largest
bending angle
per convolution ()
DN100
0.08
0.08
0.08
0.08
0.08
0.10
0.10
0.10
0.10
0.10
0.10
0.10
0.10
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.15
0.15
0.15
0.15
0.15
0.15
0.20
0.20
DN63
13
16
20
20
26
31.5
37
41
46
51
56
59
62.5
71
76
88
90
95
100
107
120
132
157
185
195
215
235
285
310
360
Effective area
of differential
pressure (cm)
DN50
Operating stroke
per convolution
DN40
Free length
per convolution
DN25
Compressed
length per
convolution
DN16
Standard
wall thickness
of diaphragm
6
8
9
10
13
16
19
21
26
31
36
39
46
46
51
60
65
70.5
75
77
90
102
127
150
162.5
180
200
250
270
320
Outer diameter
DN10
Inner diameter
Nominal diameter
0.74
1.17
1.73
1.83
3.10
4.59
6.37
7.81
10.4
13.5
16.9
19.1
23.3
27.3
32.1
43.5
47.6
54.2
60.5
67.1
87.2
108
159
221
252
307
372
563
662
909
130
99
59
80
42
37
68
36
49
39
49
37
115
54
41
75
63
52
50
42
43
46
94
166
140
142
71
78
90
95
2.20
1.9
3.72
2.86
3.75
3.13
3.56
3.49
3.61
3.48
3.27
3.20
1.74
3.23
2.40
2.41
2.48
1.93
2.35
2.29
1.79
1.67
1.53
1.36
1.18
1.17
1.07
0.88
0.85
0.76
16.9
22.4
16.2
16.0
19.1
22.0
24.9
27.1
30.9
33.7
36.8
38.4
47.7
45.3
52.3
58.3
62.3
71.3
64.6
71.8
84.4
90
107
124
132
142
155
188
209
240
Attention: The bellows data and sizes are subject to re-engineering and therefore cannot be assured. Please ask for the active data.
Other sizes, materials and specifications on request.
5-8
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1.88
2.60
3.60
4.10
4.10
4.40
4.45
4.35
4.15
4.30
4.95
5.95
6.00
4.00
6.00
6.28
6.00
6.20
Smallest
bending radius ()
1.40
2.10
3.00
3.40
3.40
3.60
3.70
3.60
3.40
3.45
4.20
5.00
4.90
3.25
5.00
5.00
5.00
5.20
Largest
bending angle
per convolution
()
1.90
1.75
3.05
3.06
3.95
3.65
4.20
4.10
3.60
3.71
4.45
5.20
5.10
3.10
5.15
4.60
3.70
3.80
0.48
0.50
0.60
0.70
0.70
0.80
0.75
0.75
0.75
0.85
0.75
0.95
1.10
0.75
1.00
1.28
1.00
1.00
Effective area
of differential
pressure (cm)
0.13
0.13
0.15
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.30
0.30
Extended length
per convolution
Operating stroke
per convolution
5
6
31.5
49
72
81
88
95
102
115
120
125
135
150
155
165
210
330
462
564
Compressed
length per
convolution
9
21
36.8
41.5
48
52
56
72
77.5
82
90.5
102.5
107.5
132.5
162.5
280
403
506
Standard
wall thickness
of diaphragm
Ouer diameter
8
20
35
40
45
50
55
70
75
80
90
100
105
130
150
275
400
500
Inner diameter
Nominal diameter
3.55
10.1
24.1
30.5
36.9
43.6
50.4
69.9
77.8
85.3
101
127
130
174
274
732
1471
2250
52
55
72
97
86
88
81
77
88
70
73
56
65
120
49
55
200
250
2.55
2.46
2.39
2.41
2.21
2.17
2.08
1.79
1.62
1.58
1.78
1.91
1.81
1.13
1.36
0.87
0.62
0.53
26.6
36.2
50.4
57.2
52.1
68.6
71.7
81.5
86.5
93.3
91.6
104
112
121
147
249
323
390
Smallest
bending radius ()
2.55
4.10
4.40
4.80
5.00
5.00
5.70
5.48
4.68
5.35
4.85
6.20
6.20
4.55
8.10
6.80
Largest
bending angle
per convolution
()
2.10
3.50
3.80
4.20
4.40
4.40
5.10
4.80
4.00
4.60
4.10
5.00
5.00
3.80
7.00
6.00
1.90
3.40
3.90
3.60
4.70
4.70
5.10
4.60
4.30
4.50
4.20
5.00
5.50
3.60
5.15
4.00
Extended length
per convolution
Standard
wall thickness
of diaphragm
0.45
0.60
0.60
0.60
0.60
0.60
0.60
0.68
0.68
0.75
0.75
1.20
1.20
0.75
1.10
0.80
Effective area
of differential
pressure (cm)
5
6
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.15
0.15
0.15
0.15
0.20
0.20
0.20
0.20
0.20
Operating stroke
per convolution
31.5
49
72
81
88
95
102
115
120
125
135
150
155
165
210
462
9
21
36.8
41.5
47
52
56
72
77.5
82
90.5
102.5
107.5
132.5
162.5
403
Compressed
length per
convolution
Outer diameter
8
20
35
40
45
50
55
70
75
80
90
100
105
130
150
400
Inner diameter
Nominal diameter
3.55
10.1
24.1
30.5
36.9
43.6
50.4
69.9
77.8
85.3
101
127
137
174
274
1471
51
43
68
45
75
80
40
55
72
100
80
55
65
80
85
150
3.82
4.09
3.02
2.97
2.86
2.65
2.86
2.39
1.91
2.11
1.74
1.91
1.85
1.32
1.91
0.74
22.5
32.9
47.4
52.1
56.0
60.5
6.30
73.8
80.4
82.9
92.2
111
115
115
138
293
Attention: The bellows data and sizes are subject to re-engineering and therefore cannot be assured. Please ask for the active data.
Other sizes, materials and specifications on request.
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5-9
Smallest
bending radius ()
1.43
1.15
1.15
1.15
1.20
1.20
1.25
1.25
1.25
1.25
1.30
1.34
1.24
1.34
1.34
1.34
1.24
1.39
1.39
1.39
1.44
1.29
1.64
1.34
1.54
1.59
1.54
1.59
1.59
1.59
1.59
1.50
Largest
bending angle
per convolution
()
1.00
0.75
0.75
0.75
0.80
0.80
0.85
0.85
0.85
0.85
0.90
0.90
0.80
0.90
0.90
0.90
0.80
0.95
0.95
0.95
1.00
0.85
1.20
0.90
1.10
1.15
1.10
1.15
1.15
1.15
1.15
1.00
1.00
0.90
0.90
0.90
1.15
1.15
1.15
1.15
1.15
1.15
1.15
1.20
1.10
1.20
1.20
1.20
1.10
1.20
1.20
1.40
1.40
1.25
1.60
1.40
1.50
1.45
1.45
1.45
1.45
1.45
1.45
1.20
Effective area
of differential
pressure (cm)
0.43
0.40
0.40
0.40
0.40
0.40
0.40
0.40
0.40
0.40
0.40
0.44
0.44
0.44
0.44
0.44
0.44
0.44
0.44
0.44
0.44
0.44
0.44
0.44
0.44
0.44
0.44
0.44
0.44
0.44
0.44
0.51
Extended length
per convolution
Operating stroke
per convolution
0.13
0.10
0.10
0.10
0.10
0.10
0.10
0.10
0.10
0.10
0.10
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.15
Free length
per convolution
31.7
34.0
36.5
38.1
39.7
42.9
44.5
46.0
47
49.2
52.4
55.5
57
58.7
61.9
65.1
67.0
71.4
74.6
81.0
84.1
84.1
92.1
98.4
104.8
108.0
114.3
117.5
123.8
127.0
143.0
180
Standard
wall thickness
of diaphragm
19
21.3
23.8
25.4
27.0
30.2
31.8
33.3
34.3
36.5
39.7
42.8
46
46.0
49.2
52.4
55.0
58.7
61.9
65.1
68.3
70.5
76.2
84.0
88.9
92.1
98.4
101.6
107.9
111.1
127.0
160
Compressed
length per
convolution
5/8
3/4
7/8
7/8
1
1 1/8
1 1/8
1 1/4
1 1/4
1 3/8
1 1/2
1 5/8
1 3/4
1 3/4
1 3/4
2
2 1/8
2 1/4
2 3/8
2 1/2
2 5/8
2 3/4
2 7/8
3 1/8
3 3/8
3 1/2
3 3/4
3 7/8
4 1/8
4 1/4
4 7/8
6 3/4
Outer diameter
18
20
22
24
25
28
30
32
33
35
38
40
45
45
48
50
53
55
60
63
65
70
75
80
85
90
95
100
105
110
125
158
Inner diameter
Nominal diameter
Small strokes with relatively large deflection forces, very narrow shape
For slide ring seal manufacturing, vacuum and semiconductor industry
Differential pressure up to 30 bar
5.15
6.11
7.25
8.02
8.84
10.6
11.5
12.5
13.1
14.5
16.8
19.1
20.9
21.6
24.3
27.2
29.3
33.3
36.7
42.1
45.8
47.1
55.8
65.5
73.8
78.8
89.0
94.4
106
111
143
227
175
113
116
110
94
109
96
126
91
106
137
194
197
179
198
209
232
230
321
150
226
213
142
205
174
189
197
203
216
210
246
280
1.81
1.26
1.18
1.13
1.15
1.07
1.09
1.06
1.04
0.99
0.98
0.93
0.80
0.88
0.83
0.79
0.68
0.76
0.73
0.67
0.68
0.58
0.75
0.52
0.60
0.61
0.55
0.56
0.53
0.52
0.46
0.32
29.5
35.1
37.7
39.4
39.7
42.9
43.2
44.6
45.6
47.8
49.5
54.9
59.9
58.0
61.2
64.4
70.4
68.8
71.9
78.0
79.1
85.6
79.8
97.3
94.3
95.3
103
104
109
112
126
182
Attention: The bellows data and sizes are subject to re-engineering and therefore cannot be assured. Please ask for the active data.
Other sizes, materials and specifications on request.
5-10
www.vacom-vacuum.com
Smallest
bending radius ()
1.70
1.60
1.40
1.40
1.60
1.50
1.45
1.60
2.00
1.60
1.60
1.60
1.93
1.50
1.65
1.65
1.65
1.60
1.70
1.74
2.00
1.74
1.74
1.99
1.94
1.84
1.99
1.94
1.84
1.74
1.84
1.84
Largest
bending angle
per convolution
()
1.35
1.20
1.00
1.00
1.20
1.10
1.05
1.20
1.65
1.20
1.20
1.20
1.60
1.10
1.25
1.25
1.25
1.20
1.30
1.30
1.50
1.30
1.30
1.55
1.50
1.40
1.55
1.50
1.40
1.30
1.40
1.40
1.45
1.40
1.40
1.40
1.45
1.45
1.40
1.45
1.38
1.50
1.55
1.40
1.55
1.30
1.40
1.40
1.50
1.40
1.40
1.40
1.80
1.45
1.55
1.95
1.90
1.70
1.95
1.85
1.70
1.40
1.70
1.70
Effective area
of differential
pressure (cm)
0.35
0.40
0.40
0.40
0.40
0.40
0.40
0.40
0.35
0.40
0.40
0.40
0.33
0.40
0.40
0.40
0.40
0.40
0.40
0.44
0.50
0.44
0.44
0.44
0.44
0.44
0.44
0.44
0.44
0.44
0.44
0.44
Extended length
per convolution
Operating stroke
per convolution
0.08
0.10
0.10
0.10
0.10
0.10
0.10
0.10
0.10
0.10
0.10
0.10
0.10
0.10
0.10
0.10
0.10
0.10
0.10
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.13
0.13
Free length
per convolution
26.7
31.7
34.0
36.5
38.1
39.7
42.9
44.5
46.0
47.0
49.2
52.4
55.5
57
58.7
61.9
65.1
67.0
71.4
74.6
81
84.1
84.1
92.1
98.4
104.8
108.0
114.3
117.5
123.8
127.0
143.0
Standard
wall thickness
of diaphragm
14
19
21.3
23.8
25.4
27.0
30.2
31.8
33.3
34.3
36.5
39.7
42.8
46
46.0
49.2
52.4
55.0
58.7
61.9
65.1
68.3
70.5
76.2
84.0
88.9
92.1
98.4
101.6
107.9
111.1
127.0
Compressed
length
per convolution
1/2
5/8
3/4
7/8
7/8
1
1 1/8
1 1/8
1 1/4
1 1/4
1 3/8
1 1/2
1 5/8
1 3/4
1 3/4
1 7/8
2
2 1/8
2 1/4
2 3/8
2 1/2
2 5/8
2 3/4
2 7/8
3 1/8
3 3/8
3 1/2
3 3/4
3 7/8
4 1/8
4 1/4
4 7/8
Outer diameter
13
18
20
22
24
25
28
30
32
33
35
38
40
45
45
48
50
53
55
60
63
65
70
75
80
85
90
95
100
105
110
125
Inner diameter
Nominal diameter
3.36
5.15
6.11
7.25
8.02
8.84
10.6
11.5
12.5
13.1
14.5
16.8
19.1
20.9
21.6
24.3
27.2
29.3
33.3
36.7
42.1
45.8
47.1
55.8
65.5
73.8
78.8
89.0
94.4
106
111
143
60
120
125
129
135
140
157
113
134
107
112
164
105
146
178
192
131
173
167
371
170
266
251
171
234
205
201
219
226
219
249
274
2.90
2.17
1.69
1.57
1.80
1.59
1.40
1.55
2.08
1.46
1.40
1.31
1.65
1.11
1.22
1.16
1.10
1.03
1.04
1.00
1.06
0.89
0.89
0.96
0.87
0.77
0.82
0.75
0.68
0.60
0.63
0.56
20.3
26.4
30.6
32.9
31.8
34.3
37.8
37.1
32.8
39.2
41.0
43.7
39.2
49.2
48.1
50.8
53.4
55.8
57.7
62.5
67.5
70.5
70.5
72.2
78.1
85.3
84.7
90.7
95.7
104
103
116
Attention: The bellows data and sizes are subject to re-engineering and therefore cannot be assured. Please ask for the active data.
Other sizes, materials and specifications on request.
www.vacom-vacuum.com
5-11
Typ H (Hals)
Typ R1 (Ring1)
Nominal
diameter
Inner diameter
bellows
Outer diameter
bellows
Inner diameter
mounting tube
DN
ID
6
9
13
16
19
21
21
26
31
36
39
46
51
65
75
90
102
127
150
180
200
250
320
OD
13
20
26
31.5
37
41
49
46
51
56
59
71
76
90
100
120
132
157
185
215
235
285
360
Di
6
10
14
16
20
22
22
27
31
35
38.4
46
51
66
72.1
100
100
134.4
150
200
200
250
317.4
DN10
DN16
DN25
DN40
DN50
DN100
DN160
DN200
DN250
DN320
Typ R2 (Ring 2)
Outer diameter
mounting tube
Da
8
12
16
18
23
25
25
30
35
38
42.4
50
54
70
76.1
104
104
139.7
154
206
206
256
323.9
Coil width
Length
S
4
4
4
4
4
4
4
4
4
4
4
4
4
5
5
5
5
5
5
6
6
6
6
L
25
25
32
32
32
32
32
40
40
50
50
60
60
75
75
75
75
91
91
91
91
91
91
Attention: The bellows data and sizes are subject to re-engineering and therefore cannot be assured. Please ask for the active data.
5-12
www.vacom-vacuum.com
3641 4275-24
VACOM
Vakuum Komponenten &
Messtechnik GmbH
www.vacom-vacuum.com
Gabelsbergerstrasse 9
07749 Jena/Germany
Your data
Name
Company
Department
Street
Postcode / City
Telephone
Fax
E-Mail
mm
Operating temperature
Outer diameter AD
mm
Bakeout temperature
Compressed length Lc
mm
bar
Extended length Le
mm
bar
Material
Axial stroke Z
mm
Lateral stroke Y
mm
Angular stroke
m m
Spring rate
N/mm
Yes
No
R1
R2
KF
ISO K
CF
Nominal diameter
compensator
DN
DN
DN
Number of pieces
Please add sketch if applicable!
Comments
Date: