Mass Flow Versus Volumetric Flow PDF
Mass Flow Versus Volumetric Flow PDF
Mass Flow Versus Volumetric Flow PDF
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MISUSE OF DOCUMENTATION
Application Sheet
Equation 1 Using the Ideal Gas Law, PV = nRT , solve for Volume (V): or V = nRT
P
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This application note describes the difference between mass flow in terms of volumetric flow at standard conditions (760 Torr and 0C) and volumetric flow at nonstandard conditions. Mass flow is a dynamic mass/rate unit measured in grams/minute. By referencing a volumetric flow to a standard temperature and pressure, an exact mass flow (g/min) can be calculated from volumetric flow. It is common in the industry to specify mass flow in terms of volumetric flow at standard (reference) conditions. In accordance with these standards, Honeywell mass flow sensors are specified as having volumetric flow at calibration reference conditions of 760 Torr and 0C. This translates to a specific mass flow rate. 3 For example, 200 cm /min (volumetric flow) of nitrogen at standard conditions of temperature and pressure calculates to 0.2498 g/min mass flow. The following formulae are used to find true mass flow in g/min from volumetric flow (Q): I. FINDING TRUE MASS FLOW (g/min) FROM VOLUMETRIC FLOW (Q) DEFINITIONS P = Pressure 3 V = Volume (cm ) n = Number of moles of gas R = Gas constant .0821 (liters atm/mole K) 3 or 82.1 (cm atm/mole K) T = Absolute temperature in Kelvin (K) 3 = Gas density (g/cm ) m = Mass in grams (g) = Mass flow (g/min) m Q = Volumetric flow Qs = Volumetric flow at standard conditions (sccm)
Equation 2 m Gas density is defined as: = V Equation 3 Substitute Equation 1 into Equation 2 to redefine gas density as: =
mP nR T
Equation 4 Mass flow is equal to density times volumetric flow = Q rate: m Equation 5 Redefine mass flow using gas density as derived from the Ideal Gas Law. Substitute Equation 3 into
= Equation 4: m mP nR T
Example 1 3 Assume a volumetric flow rate of Q = 200 cm /min of nitrogen (N2) at standard pressure of 760 Torr and pressure of 0C, and solve for true mass flow (g/min): Given: 3 Q = 200 cm /min m = 28.0134 grams in 1 mole of N2 n = 1 mole P = 1 atm (760 Torr) 3 R = 82.1 (cm 1 atm)/(mole K) T = 273.13K(0C) = .2498 (g/min) Answer: m II. FINDING VOLUMETRIC FLOW (Q) FROM TRUE MASS FLOW (g/min) Microbridge products are specified in standard volumetric flow (Qs) such as standard cubic centimeters per minute (sccm) or standard liters per minute (slpm) which can be translated into true mass flow as indicated above. The microbridge sensor is a mass flow device rather than a volumetric one. At a constant mass flow, the microbridge device will give the same output voltage even if there are temperature or pressure changes. Because the microbridge sensor senses mass flow, confusion may result when mass
Application Sheet
m
Use the following given values to calculate volumetric flow rate (Q). Multiply the R value by 3 1000 to convert the number to cm : Given: = .2498 (g/min) m m = 28.0134 grams in 1 mole of N2 n = 1 mole P = 1.000 atm (760 Torr) 3 R = 82.1 (cm 1 atm)/(mole K) T = 273.13K(0C) + 25C = 298.13 K 3 Answer: Q = 218.26 cm /min In this example, the standard volumetric flow rate 3 (Qs) is 200 cm /min while nonstandard volumetric 3 flow rate increases to 218.26 cm /min.
This increase reflects the fact that as temperature increases, gas expands, placing more distance between gas molecules. More distance between molecules means less mass in a given volume as temperature increases. If mass flow is kept constant, and temperature increases, volume flow increases to pass the same amount of mass (molecules) across the sensor. (see Figures 1 and 2).
Figure 1
Figure 2
Application Sheet
=m m s x
That is,
Equation 7: Solving for Qx yields: Ps Tx Qx = Qs Px Ts Equation 7 Equation 7 calculates volumetric flow (Qx) at X conditions from volumetric flow (Qs) at reference conditions of 760 Torr and 0C.
Given: Qs = 200 sccm Ps = 1 Torr or 1 atm Px = 1 Torr or 1 atm Ts = 273.13K (0C) Tx = 298.13K (25C) Ps Tx 3 = 218.3 cm /min Answer: Qx = Qs Px Ts
Application Sheet
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